SH

Shigeru Hayata

SH Shinkawa: 19 patents #11 of 229Top 5%
Canon: 5 patents #9,253 of 19,416Top 50%
Overall (All Time): #167,757 of 4,157,543Top 5%
24
Patents All Time

Issued Patents All Time

Showing 1–24 of 24 patents

Patent #TitleCo-InventorsDate
12374650 Manufacturing apparatus and manufacturing method of semiconductor device Osamu Kakutani 2025-07-29
12261148 Wire bonding apparatus 2025-03-25
12057427 Wire bonding apparatus Osamu Kakutani 2024-08-06
11367703 Bonding apparatus Hiroya Yuzawa, Yuto HATTORI 2022-06-21
10816322 Bonding apparatus and method for detecting height of bonding target Hiromi Tomiyama 2020-10-27
10586781 Bonding apparatus and method of estimating position of landing point of bonding tool Hiroya Yuzawa, Hiromi Tomiyama 2020-03-10
10262968 Wire bonding apparatus and wire bonding method Satoshi Enokido 2019-04-16
10118246 Mounting apparatus Hiroya Yuzawa, Yusuke Matsuki 2018-11-06
7886956 Bonding apparatus and bonding stage height adjustment method for the bonding apparatus Kohei Seyama, Yutaka Kondo, Osamu Kakutani 2011-02-15
7848022 Imaging device and method for a bonding apparatus 2010-12-07
6945446 Wire bonding method and apparatus 2005-09-20
6814121 Bonding apparatus Ryuichi Kyomasu, Satoshi Enokido, Toshiaki Sasano 2004-11-09
6762848 Offset measurement method, tool position detection method and bonding apparatus Ryuichi Kyomasu, Satoshi Enokido, Toshiaki Sasano 2004-07-13
6683731 Bonding apparatus 2004-01-27
6657799 Wire bonding apparatus 2003-12-02
6467673 Bonding apparatus and bonding method Satoshi Enokido, Ryuichi Kyomasu, Toshiaki Sasano 2002-10-22
6464126 Bonding apparatus and bonding method Ryuichi Kyomasu, Satoshi Enokido, Toshiaki Sasano 2002-10-15
6381359 Bonding apparatus 2002-04-30
6311391 Flip-chip bonding apparatus Shigeru Fuke, Masaki Yokohama 2001-11-06
6055039 Illumination system and exposure apparatus using the same 2000-04-25
5726739 Projection exposure apparatus and device manufacturing method using the same 1998-03-10
5726740 Projection exposure apparatus having illumination device with ring-like or spot-like light source Takahisa Shiozawa, Masato Muraki, Hiroyuki Ishii 1998-03-10
5367404 Image projection method and semiconductor device manufacturing method using the same 1994-11-22
5345292 Illumination device for projection exposure apparatus Takahisa Shiozawa, Masato Muraki, Hiroyuki Ishii 1994-09-06