Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9182289 | Apparatus and method for estimating wavefront parameters | Harrison H. Barrett, Luca Caucci, Lars R. Furenlid | 2015-11-10 |
| 9091614 | Wavefront optical measuring apparatus | Yasuyuki Unno | 2015-07-28 |
| 8314938 | Method and apparatus for measuring surface profile of an object | Yasuyuki Unno | 2012-11-20 |
| 8223313 | Light intensity distribution measurement apparatus and measurement method, and exposure apparatus | — | 2012-07-17 |
| 8139215 | Method for measuring polarization characteristics and measurement apparatus | — | 2012-03-20 |
| 8085384 | Exposure apparatus | Akiyoshi Suzuki | 2011-12-27 |
| 8009272 | Method and device for image measurement, exposure apparatus, substrate for image measurement, and device manufacturing method | — | 2011-08-30 |
| 7929113 | Measurement apparatus, measurement method, exposure apparatus, and device manufacturing method | — | 2011-04-19 |
| 7911585 | Measurement apparatus, exposure apparatus, and device manufacturing method | — | 2011-03-22 |
| 7414240 | Particle remover, exposure apparatus having the same, and device manufacturing method | Kenji Yamazoe, Hiroshi Osawa | 2008-08-19 |
| 7379151 | Exposure apparatus comprising cleaning apparatus for cleaning mask with laser beam | Hiroshi Osawa, Kenji Yamazoe | 2008-05-27 |
| 7304749 | Point diffraction interferometer and exposure apparatus and method using the same | — | 2007-12-04 |
| 7295327 | Measuring apparatus and exposure apparatus having the same | — | 2007-11-13 |
| 7199939 | Immersion optical system and optical apparatus having the same | Tokuyuki Honda, Hideki Morishima | 2007-04-03 |
| 7200077 | Tilt angle detection device and method utilizing pattern identification | Takuma Yanagisawa | 2007-04-03 |
| 7190642 | Focus servo device | Takuma Yanagisawa | 2007-03-13 |
| 6590857 | Optical disk | Takuma Yanagisawa, Takayuki Nomoto | 2003-07-08 |