Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9164370 | Exposure apparatus and device manufacturing method using original with phase-modulation diffraction grating to form interference pattern | Yasuhiro Kishikawa, Seiji Takeuchi | 2015-10-20 |
| 8400641 | Interferometer for aspherical or spherical surface measurements | Yasunori Furukawa | 2013-03-19 |
| 8321815 | Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method | Kenji Yamazoe | 2012-11-27 |
| 7616290 | Exposure apparatus and method | — | 2009-11-10 |
| 7292309 | Exposure apparatus and device manufacturing method | — | 2007-11-06 |
| 7239372 | Exposure apparatus and device manufacturing method | — | 2007-07-03 |
| 7199939 | Immersion optical system and optical apparatus having the same | Akinori Ohkubo, Hideki Morishima | 2007-04-03 |
| 7031610 | Diffraction-compensated integrated WDM | Robert R. McLeod | 2006-04-18 |
| 6836349 | Optical performance monitoring device | Valentine N. Morozov, Long Yang | 2004-12-28 |
| 6700664 | Optical channel monitoring device | Yevgeniy Churin, Long Yang | 2004-03-02 |
| 6540397 | Optical information storage medium | Jiro Yoshinari, Takuya Tsukagoshi, Hideki Hirata, Naoki Hayashida, Mark McDonald +6 more | 2003-04-01 |
| 6322933 | Volumetric track definition for data storage media used to record data by selective alteration of a format hologram | Andrew Daiber, Robert R. McLeod | 2001-11-27 |
| 6310850 | Method and apparatus for optical data storage and/or retrieval by selective alteration of a holographic storage medium | Sergei Sochava, Sergei Orlov, Brian Cumpston, Lambertus Hesselink | 2001-10-30 |