| 9164370 |
Exposure apparatus and device manufacturing method using original with phase-modulation diffraction grating to form interference pattern |
Tokuyuki Honda, Seiji Takeuchi |
2015-10-20 |
| 7733461 |
Exposure apparatus |
— |
2010-06-08 |
| 7286226 |
Method and apparatus for measuring birefringence |
Seiji Takeuchi |
2007-10-23 |
| 7251029 |
Birefringence measurement apparatus, strain remover, polarimeter and exposure apparatus |
Seiji Takeuchi |
2007-07-31 |
| 7180051 |
Polarization state detecting system, light source, and exposure apparatus |
Seiji Takeuchi |
2007-02-20 |
| 7161675 |
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus |
Seiji Takeuchi |
2007-01-09 |
| 7095497 |
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus |
Seiji Takeuchi |
2006-08-22 |
| 7015456 |
Exposure apparatus that acquires information regarding a polarization state of light from a light source |
Seiji Takeuchi |
2006-03-21 |
| 6992763 |
Beam splitting apparatus, transmittance measurement apparatus, and exposure apparatus |
Seiji Takeuchi |
2006-01-31 |
