Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9751632 | Movement unit | Hiroaki Mochizuki, Hiroomi Kuribayashi, Akito Kaneko, Keisuke Hagiwara | 2017-09-05 |
| 7313800 | Disk centering system | Akihisa Inatani, Yasuo Osada, Toshimasa Takahashi, Yasuhiro Suda, Hiromu Watanabe +2 more | 2007-12-25 |
| 7113263 | Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device | Ryuichi Ebinuma | 2006-09-26 |
| 6867848 | Supporting structure of optical element, exposure apparatus having the same, and manufacturing method of semiconductor device | Ryuichi Ebinuma | 2005-03-15 |
| 6122114 | Optical-element supporting device and optical apparatus | Norikazu Shigeno, Tetsuya Sekino, Tetsuya Furusawa | 2000-09-19 |