Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8508870 | Supporting device, optical apparatus, exposure apparatus, and device manufacturing method | — | 2013-08-13 |
| 8064152 | Supporting device, optical apparatus, exposure apparatus, and device manufacturing method | — | 2011-11-22 |
| 7746575 | Support mechanism, exposure apparatus having the same, and aberration reducing method | — | 2010-06-29 |
| 7218462 | Holding mechanism, optical apparatus and device manufacturing method | — | 2007-05-15 |
| 7139137 | Support mechanism, exposure apparatus having the same, and aberration reducing method | — | 2006-11-21 |
| 7006308 | Retainer, exposure apparatus, and device fabrication method | — | 2006-02-28 |
| 6909493 | Correction member, retainer, exposure apparatus, and device fabrication method | — | 2005-06-21 |
| 6563652 | Lens barrel and projection aligner | — | 2003-05-13 |
| 6285512 | Lens barrel having deformed optical element, and projection including same | — | 2001-09-04 |
| 6144504 | Projection and exposure apparatus including an optical member and a holding member | Masao Kosugi, Ryuichi Ebinuma | 2000-11-07 |
| 5172283 | Mode changing slider plate mechanism for tape recording and/or reproducing apparatus | Yutaka Fukuyama, Yoshinori Yamamoto, Tatsuya Mototake | 1992-12-15 |