Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5841250 | Stage apparatus and linear motor, and exposure apparatus and device production method using the stage apparatus | Ryuichi Ebinuma | 1998-11-24 |
NK
Nobushige Korenage
Overall (All Time): #3,704,028 of 4,157,543Top 90%
1
Patents All Time