Issued Patents All Time
Showing 26–41 of 41 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7233383 | Exposure apparatus, device manufacturing method, pattern generator and maintenance method to check for pixel deterioration | Toshinobu Tokita, Hirohisa Ota, Eigo Kawakami, Takashi Nakamura | 2007-06-19 |
| 7218382 | Load-lock technique | — | 2007-05-15 |
| 7196321 | Fine pattern forming apparatus and fine pattern inspecting apparatus | Eigo Kawakami, Hirohisa Ota, Takashi Nakamura, Toshinobu Tokita | 2007-03-27 |
| 7180575 | Exposure apparatus and device manufacturing method | Hirohisa Ota, Eigo Kawakami, Takashi Nakamura, Toshinobu Tokita | 2007-02-20 |
| 7110504 | Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method | — | 2006-09-19 |
| 7027127 | Exposure apparatus, device manufacturing method, stage apparatus, and alignment method | — | 2006-04-11 |
| 6987830 | Radiation generating apparatus, radiation generating method, exposure apparatus, and exposure method | — | 2006-01-17 |
| 6754303 | Exposure apparatus and exposing method | — | 2004-06-22 |
| 6714277 | Exposure apparatus, gas replacement method, semiconductor device manufacturing method, semiconductor manufacturing factory and exposure apparatus maintenance method | Shinichi Hara, Yutaka Tanaka, Toru Hirabayashi | 2004-03-30 |
| 6463119 | Exposure method, exposure apparatus and semiconductor manufacturing apparatus | Shigeru Terashima, Takeshi Miyachi, Yutaka Watanabe | 2002-10-08 |
| 6381005 | Mask holding device, exposure apparatus and device manufacturing method | Takeshi Miyachi | 2002-04-30 |
| 5854819 | Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same | Shinichi Hara, Takeshi Miyachi, Nobutoshi Mizusawa, Yuji Chiba | 1998-12-29 |
| 5835560 | Exposure apparatus | Mitsuaki Amemiya, Yutaka Watanabe | 1998-11-10 |
| 5572563 | Mirror unit and an exposure apparatus using the unit | Yutaka Watanabe | 1996-11-05 |
| 5448612 | X-ray exposure apparatus | Naoto Abe, Ryuichi Ebinuma, Takayuki Hasegawa | 1995-09-05 |
| 5191218 | Vacuum chuck | Tetsuzo Mori, Mitsuji Marumo, Kazunori Iwamoto, Yuji Chiba | 1993-03-02 |