Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8747745 | Apparatus and method for biochemical analysis | — | 2014-06-10 |
| 8175810 | Sample processing apparatus and sample processing method | — | 2012-05-08 |
| 7256590 | Capacitance sensor type measuring apparatus | — | 2007-08-14 |
| 7212015 | Capacitance sensor type measuring apparatus | — | 2007-05-01 |
| 7180574 | Exposure apparatus and method | — | 2007-02-20 |
| 7019538 | Electrostatic capacitance sensor type measurement apparatus | — | 2006-03-28 |
| 6891927 | Light generation apparatus, exposure apparatus, and device manufacturing method | — | 2005-05-10 |
| 6754302 | X-ray exposure apparatus | — | 2004-06-22 |
| 6552798 | Position detecting method and system for use in exposure apparatus | Hideki Ina, Takehiko Suzuki | 2003-04-22 |
| 5586159 | Substrate holding system and exposure apparatus having the same | Mitsutoshi Kuno, Mitsuji Marumo | 1996-12-17 |
| 5377009 | Alignment method | Kenji Saitoh | 1994-12-27 |