Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7425238 | Substrate holding device | Yukio Takabayashi | 2008-09-16 |
| 6965428 | Stage apparatus, exposure apparatus, and semiconductor device manufacturing method | Kazunori Iwamoto, Yukio Takabayashi, Takashi Meguro | 2005-11-15 |