Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5191218 | Vacuum chuck | Tetsuzo Mori, Mitsuji Marumo, Yuji Chiba, Kazuyuki Kasumi | 1993-03-02 |
| 5168512 | Method of manufacture of semiconductor devices | Nobutoshi Mizusawa, Takao Kariya, Shunichi Uzawa, Ryuichi Ebinuma | 1992-12-01 |
| 5160961 | Substrate holding device | Mitsuji Marumo, Nobutoshi Mizusawa, Takao Kariya, Shunichi Uzawa | 1992-11-03 |
| 5128975 | X-ray exposure system | Shunichi Uzawa, Takao Kariya, Ryuichi Ebinuma | 1992-07-07 |
| 4854444 | Precise feeding mechanism | — | 1989-08-08 |