Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8450031 | Determination method, exposure method and storage medium | Yuichi Gyoda, Hiroyuki Ishii, Youzou Fukagawa | 2013-05-28 |
| 8102503 | Exposure apparatus and method of manufacturing device | Toshiyuki Yoshihara | 2012-01-24 |
| 7301615 | Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method | Youzou Fukagawa, Toshiyuki Yoshihara, Mario Nakamori | 2007-11-27 |
| 7230692 | Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method | Youzou Fukagawa, Toshiyuki Yoshihara, Mario Nakamori | 2007-06-12 |