Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7346886 | Method and apparatus for determining chip arrangement position on substrate | Youzou Fukagawa | 2008-03-18 |
| 7301615 | Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method | Youzou Fukagawa, Toshiyuki Yoshihara, Yuji Shinano | 2007-11-27 |
| 7230692 | Optical apparatus, method of determining position of optical element in optical system, and device manufacturing method | Youzou Fukagawa, Toshiyuki Yoshihara, Yuji Shinano | 2007-06-12 |