Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9043182 | Absolute position measurement apparatus and method | Yuzo Seo, Chidane Ouchi | 2015-05-26 |
| 7955938 | Wiring technique | — | 2011-06-07 |
| 7686144 | Vibration isolation device, arithmetic apparatus, exposure apparatus, and device manufacturing method | Takashi Shibayama, Takehiko Mayama | 2010-03-30 |
| 7294906 | Wiring technique | — | 2007-11-13 |
| 7081950 | Stage device and control method therefor, exposure apparatus, and device manufacturing method | — | 2006-07-25 |
| 6847132 | Electromagnetic actuator having an armature coil surrounded by heat-conducting anisotropy material and exposure apparatus | — | 2005-01-25 |
| 6654098 | Stage apparatus, exposure apparatus, and device production method | Toshiya Asano | 2003-11-25 |
| 6285457 | Exposure apparatus and device manufacturing method including measuring position and/or displacement of each of a base and a stage with respect to a support | — | 2001-09-04 |
| 5773953 | Substrate transfer system | Yukio Yamane | 1998-06-30 |
| 4934064 | Alignment method in a wafer prober | Nobuhito Yamaguchi, Mitsuya Sato, Taro Ohmori, Eiichi Murakami | 1990-06-19 |
| 4929893 | Wafer prober | Mitsuya Sato, Nobuhito Yamaguchi, Taro Ohmori, Eiichi Murakami | 1990-05-29 |
| 4779981 | Reject chip marking device and method of discriminating reject mark | — | 1988-10-25 |