Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7777762 | Image processing device and method for design | Yasuo Katano, Tsuyoshi Kuroki | 2010-08-17 |
| 6947140 | Birefringence measurement apparatus and method | — | 2005-09-20 |
| 6873397 | Exposure apparatus, gas replacing method, and method of manufacturing a semiconductor device | — | 2005-03-29 |
| 6414742 | Stage apparatus, and exposure apparatus and device manufacturing method using the same | Nobushige Korenaga | 2002-07-02 |
| 6226072 | Stage system and exposure apparatus with the same | — | 2001-05-01 |
| 6157159 | Stage system and exposure apparatus using the same | Nobushige Korenaga | 2000-12-05 |
| 4998821 | Projection apparatus | Masakatsu Ohta, Junichi Murakami | 1991-03-12 |
| 4907021 | Projection exposure apparatus | — | 1990-03-06 |
| 4869481 | Plate-like article holding device | Kazuo Takahashi, Yukio Yamane | 1989-09-26 |
| 4814625 | Exposure apparatus having gas supplying means for air blow off | — | 1989-03-21 |
| 4786947 | Projection exposure apparatus | Masao Kosugi, Toshikazu Matsushita, Masakatsu Ohta | 1988-11-22 |
| 4662753 | Apparatus and method for aligning objects | — | 1987-05-05 |
| 4506977 | Transfer apparatus provided with an auto-focusing mechanism | Hiroshi Sato, Masao Kosugi | 1985-03-26 |
| 4479711 | Mask aligner | Masao Kosugi, Hiroshi Sato, Kazuo Takahashi, Ichiro Ishiyama | 1984-10-30 |