Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429764 | Measurement method, imprint apparatus, and article manufacturing method | Masataka Yasukawa | 2025-09-30 |
| 11988956 | Measurement method, imprint apparatus, and article manufacturing method | Masataka Yasukawa | 2024-05-21 |
| 11822234 | Imprint apparatus, imprint method, and article manufacturing method | Toshiaki Suzuya | 2023-11-21 |
| 11520229 | Imprint apparatus and method of manufacturing article | — | 2022-12-06 |
| 11454885 | Imprint apparatus and article manufacturing method | — | 2022-09-27 |
| 10814534 | Discharge apparatus, imprint apparatus, method of detection, method of determination, and method for manufacturing article | Yuichi Fujita | 2020-10-27 |
| 10201927 | Imprint apparatus, foreign particle removal method, and method of manufacturing article | Makoto Mizuno, Tsuyoshi Arai | 2019-02-12 |
| 10112324 | Imprint method, imprint apparatus, and production method for article | Yoshikazu Miyajima, Yukio Takabayashi | 2018-10-30 |
| 9952504 | Imprint method, imprint apparatus, and method for manufacturing device | Yoshikazu Miyajima, Yukio Takabayashi | 2018-04-24 |
| 9339970 | Imprint apparatus, and article manufacturing method | Shintarou Narioka, Yukio Takabayashi | 2016-05-17 |