Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12092967 | Method of determining position of mark, lithography method, exposure apparatus, and article manufacturing method | Wataru Yamaguchi | 2024-09-17 |
| 10160895 | Coolant composition, method of operating internal combustion engine using the same, and use of the same | Yasuaki KODAMA, Kazuhiro Miyajima, Shogo Kamenoue, Shinichi Ogura, Kazuhito Yaeda +3 more | 2018-12-25 |
| 8625073 | Exposure apparatus and device manufacturing method | Shinichi Hirano | 2014-01-07 |
| 7352520 | Holding device and exposure apparatus using the same | Yukio Takabayashi | 2008-04-01 |