Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257921 | Lithography apparatus and method of manufacturing article | Tadashi Aoki, Hiroshi Isoyama, Ken Katsukura, Hiroshi Tanaka | 2016-02-09 |
| 8502958 | Positioning device, lithographic apparatus using same, and device manufacturing method | — | 2013-08-06 |
| 7657794 | Data storage device and error recovery method | Masatoshi Ichikawa, Akira Kojima, Kazunari Kose | 2010-02-02 |
| 6809300 | Temperature adjusting system in exposure apparatus | Shinji Wakui | 2004-10-26 |
| 5696590 | Position control method position control apparatus, and semiconductor manufacturing apparatus | — | 1997-12-09 |
| 4579453 | Method and apparatus for detecting a mark position | — | 1986-04-01 |