Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7052731 | Plasma processing apparatus, protecting layer therefor and installation of protecting layer | Muneo Furuse, Tomoyuki Tamura | 2006-05-30 |
| 6914005 | Plasma etching method | Muneo Furuse, Mitsuru Suehiro, Hiroshi Kanekiyo, Tomoyuki Tamura | 2005-07-05 |