Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8262801 | Vacuum processing method | Ken Kitaoka, Masamichi Sakaguchi | 2012-09-11 |
| 7913646 | Vacuum processing apparatus and vacuum processing method | Ken Kitaoka, Masamichi Sakaguchi | 2011-03-29 |
| 6583979 | Electrostatically attracting electrode and a method of manufacture thereof | Youichi Itou, Saburo Kanai, Seiichiro Kanno | 2003-06-24 |
| 6370007 | Electrostatic chuck | Youichi Itou, Saburo Kanai, Seiichiro Kanno | 2002-04-09 |