Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D907593 | Discharge chamber for a plasma processing apparatus | Keitarou Ogawa | 2021-01-12 |
| D864885 | Infrared lamp heater transmission window for semiconductor manufacturing apparatus | Michiaki Kobayashi, Kazuyuki Hirozane, Akio Harada, Yutaka Kouzuma | 2019-10-29 |
| 10121686 | Vacuum processing apparatus | Yoshifumi Ogawa, Masanori Kadotani, Masakazu Isozaki | 2018-11-06 |
| 8707899 | Plasma processing apparatus | Ryouta Kitani, Yasukiyo Morioka, Motohiko Yoshigai | 2014-04-29 |