Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665436 | Plasma processing apparatus | Takashi Uemura, Kohei Satou | 2020-05-26 |
| D812578 | Upper chamber for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2018-03-13 |
| D804436 | Upper chamber for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2017-12-05 |
| D802545 | Lower chamber for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2017-11-14 |
| D802790 | Cover ring for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2017-11-14 |
| D770992 | Electrode cover for a plasma processing apparatus | Takashi Uemura, Kohei Sato | 2016-11-08 |
| 9343340 | Vacuum processing apparatus | Keita Nogi, Hideaki Kondo, Teruo Nakata | 2016-05-17 |
| 9245780 | Vacuum processing apparatus and operating method of the same | Takahiro Shimomura, Yoshifumi Ogawa | 2016-01-26 |
| 9011065 | Vacuum processing apparatus and operating method of vacuum processing apparatus | Hideaki Kondo, Teruo Nakata, Keita Nogi, Atsushi Shimoda, Takafumi Chida | 2015-04-21 |
| 8849446 | Vacuum processing apparatus and program | Teruo Nakata, Hideaki Kondo, Keita Nogi | 2014-09-30 |
| 8747046 | Vacuum processing apparatus | Ryoichi Isomura, Hideaki Kondo | 2014-06-10 |
| 8740011 | Vacuum processing apparatus | Akitaka Makino | 2014-06-03 |
| 8538573 | Vacuum processing apparatus and program | Teruo Nakata, Hideaki Kondo, Keita Nogi | 2013-09-17 |
| 8460467 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara | 2013-06-11 |
| 8286822 | Vacuum processing apparatus | Akitaka Makino | 2012-10-16 |
| 8148268 | Plasma treatment apparatus and plasma treatment method | Kohei Sato, Hideaki Kondo, Akitaka Makino | 2012-04-03 |
| 8075733 | Plasma processing apparatus | Seiichi Watanabe, Naoki Yasui, Yasuhiro Nishimori | 2011-12-13 |
| 7976632 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara | 2011-07-12 |
| 7833382 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara | 2010-11-16 |
| 7828928 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara | 2010-11-09 |
| 7807581 | Plasma processing apparatus and plasma processing method | Akitaka Makino, Seiichi Watanabe, Naoki Yasui | 2010-10-05 |
| 7674351 | Plasma processing apparatus | Akitaka Makino, Hideki Kihara | 2010-03-09 |
| 7641069 | Vacuum processing apparatus | Akitaka Makino | 2010-01-05 |
| 7416633 | Plasma processing apparatus | Akitaka Makino, Hideki Kihara | 2008-08-26 |
| 7335277 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara | 2008-02-26 |