Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7322561 | Vacuum processing apparatus | Akitaka Makino | 2008-01-29 |
| D557425 | Cover ring for a plasma processing apparatus | Tsutomu Nakamura, Akitaka Makino | 2007-12-11 |
| D556704 | Grounded electrode for a plasma processing apparatus | Tsutomu Nakamura, Akitaka Makino | 2007-12-04 |
| 7247207 | Vacuum processing apparatus | Akitaka Makino, Youji Takahashi, Minoru Soraoka, Hideki Kihara | 2007-07-24 |
| 7194821 | Vacuum processing apparatus and vacuum processing method | Manabu Edamura, Akitaka Makino, Motohiko Yoshigai, Takanori Nakatsuka | 2007-03-27 |
| 6837937 | Plasma processing apparatus | Masanori Kadotani, Muneo Furuse, Motohiko Yoshigai | 2005-01-04 |