Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11580481 | Production management support system and production management support method that automatically determine loss factors | Satoshi Fukuda | 2023-02-14 |
| 11514384 | Productivity improvement support system and productivity improvement support method | — | 2022-11-29 |
| 11315064 | Information processing device and production instruction support method | Teruo Nakata | 2022-04-26 |
| 11289313 | Plasma processing apparatus | Shota Umeda, Akira Kagoshima, Daisuke Shiraishi | 2022-03-29 |
| 9507328 | Processing chamber allocation setting device and processing chamber allocation setting program | Teruo Nakata, Satomi Inoue | 2016-11-29 |
| 9385016 | Semiconductor processing system and program | Teruo Nakata, Hideaki Kondo | 2016-07-05 |
| 9343340 | Vacuum processing apparatus | Hideaki Kondo, Susumu Tauchi, Teruo Nakata | 2016-05-17 |
| 9257318 | Operation method for vacuum processing apparatus | Michinori Kawaguchi, Satomi Inoue, Yoshiro Suemitsu | 2016-02-09 |
| 9011065 | Vacuum processing apparatus and operating method of vacuum processing apparatus | Susumu Tauchi, Hideaki Kondo, Teruo Nakata, Atsushi Shimoda, Takafumi Chida | 2015-04-21 |
| 8849446 | Vacuum processing apparatus and program | Teruo Nakata, Hideaki Kondo, Susumu Tauchi | 2014-09-30 |
| 8812151 | Vacuum process device and vacuum process method | Teruo Nakata, Satomi Inoue, Michinori Kawaguchi | 2014-08-19 |
| 8588962 | Vacuum processing device and method of transporting process subject member | Teruo Nakata, Yoshiro Suemitsu, Michinori Kawaguchi, Satomi Inoue | 2013-11-19 |
| 8538573 | Vacuum processing apparatus and program | Teruo Nakata, Hideaki Kondo, Susumu Tauchi | 2013-09-17 |