Issued Patents All Time
Showing 1–25 of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12368031 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Koichi Nakaune, Nanako Tamari, Shigeru Nakamoto | 2025-07-22 |
| 12014909 | Plasma processing apparatus and plasma processing system | Ryoji Asakura, Shota Umeda, Daisuke Shiraishi, Akira Kagoshima | 2024-06-18 |
| 11979255 | Communication system and communication method | Takeaki NISHIOKA, Hiroshi Osawa | 2024-05-07 |
| 11954512 | Control device and control method | Masayuki Nishiki, Hiroshi Osawa, Takayuki Fujiwara | 2024-04-09 |
| 11605530 | Plasma processing apparatus, data processing apparatus and data processing method | Seiichi Watanabe, Shigeru Nakamoto, Kousuke Fukuchi | 2023-03-14 |
| 11424110 | Plasma processing apparatus and operational method thereof | Masahito Togami, Tatehito Usui, Kosa Hirota, Shigeru Nakamoto | 2022-08-23 |
| 11404253 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Ryoji Asakura, Daisuke Shiraishi, Akira Kagoshima | 2022-08-02 |
| 11355324 | Plasma processing method | Kosa Hirota, Masahiro Sumiya, Koichi Nakaune, Nanako Tamari, Shigeru Nakamoto | 2022-06-07 |
| 11323385 | Communication system and communication method | Masayuki Nishiki, Takayuki Fujiwara, Satoshi Nishiyama | 2022-05-03 |
| 11308182 | Data processing method, data processing apparatus and processing apparatus | Seiichi Watanabe, Shigeru Nakamoto, Kousuke Fukuchi | 2022-04-19 |
| 11212206 | Control device and control method | Masayuki Nishiki, Hiroshi Osawa, Satoshi Nishiyama, Takayuki Fujiwara | 2021-12-28 |
| 10872774 | Plasma processing apparatus and plasma processing method | Hao Xu, Hiroshige Uchida, Shigeru Nakamoto, Kousuke Fukuchi | 2020-12-22 |
| 10872750 | Plasma processing apparatus and plasma processing system | Ryoji Asakura, Shota Umeda, Daisuke Shiraishi, Akira Kagoshima | 2020-12-22 |
| 10783220 | Data processing method, data processing apparatus and processing apparatus | Seiichi Watanabe, Shigeru Nakamoto, Kousuke Fukuchi | 2020-09-22 |
| 10734207 | Plasma processing apparatus and analysis method for analyzing plasma processing data | Ryoji Asakura, Daisuke Shiraishi, Akira Kagoshima | 2020-08-04 |
| 10672595 | Plasma processing apparatus and operation method thereof | Takeshi Ohmori, Daisuke Satou, Tatehito Usui, Kenji Maeda | 2020-06-02 |
| 10615010 | Plasma processing apparatus, data processing apparatus and data processing method | Seiichi Watanabe, Shigeru Nakamoto, Kousuke Fukuchi | 2020-04-07 |
| 10453695 | Plasma processing apparatus and plasma processing method | Soichiro Eto, Takeshi Ohmori, Tatehito Usui | 2019-10-22 |
| 10408762 | Plasma processing apparatus, plasma processing method and plasma processing analysis method | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi, Akira Kagoshima | 2019-09-10 |
| 10262840 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Shigeru Nakamoto, Shoji Ikuhara, Toshihiro Morisawa | 2019-04-16 |
| 10153217 | Plasma processing apparatus and plasma processing method | Daisuke Shiraishi, Akira Kagoshima, Yuji Nagatani | 2018-12-11 |
| 10073818 | Data processing method, data processing apparatus and processing apparatus | Seiichi Watanabe, Shigeru Nakamoto, Kousuke Fukuchi | 2018-09-11 |
| 10020233 | Plasma processing apparatus and plasma processing method | Shigeru Nakamoto, Tatehito Usui, Kousa Hirota, Kousuke Fukuchi | 2018-07-10 |
| 10008370 | Plasma processing apparatus and operation method thereof | Takeshi Ohmori, Daisuke Satou, Tatehito Usui, Kenji Maeda | 2018-06-26 |
| 9934946 | Plasma processing apparatus and operating method of plasma processing apparatus | Yohei Kawaguchi, Tatehito Usui, Masahito Togami, Shigeru Nakamoto | 2018-04-03 |