Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11062274 | Maintenance planning apparatus and maintenance planning method | Yasuharu NAMBA, Toshiyuki Ukai, Naohiro Suzuki | 2021-07-13 |
| 10262840 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Satomi Inoue, Shigeru Nakamoto, Shoji Ikuhara | 2019-04-16 |
| 9110461 | Semiconductor manufacturing equipment | Daisuke Shiraishi, Satomi Inoue, Akira Kagoshima | 2015-08-18 |
| 8992721 | Plasma processing apparatus | Akira Kagoshima, Daisuke Shiraishi, Satomi Inoue, Shigeru Nakamoto, Shoji Ikuhara | 2015-03-31 |
| 8924001 | Etching apparatus, control simulator, and semiconductor device manufacturing method | Daisuke Shiraishi, Satomi Inoue, Akira Kagoshima | 2014-12-30 |
| 8486290 | Etching apparatus, analysis apparatus, etching treatment method, and etching treatment program | Daisuke Shiraishi, Satomi Inoue | 2013-07-16 |
| 8367431 | Manufacturing method of semiconductor photonic device substrate | Takehiko Tani, Hisataka Nagai, Takashi Furuya | 2013-02-05 |
| 8282849 | Etching process state judgment method and system therefor | Shoji Ikuhara, Akira Kagoshima, Daisuke Shiraishi | 2012-10-09 |
| 7809459 | Advanced-process-control system utilizing a lambda tuner | Andrew C. Walker, Yeak-Chong Wong | 2010-10-05 |
| 7070477 | Method of polishing semiconductor wafer | Hisahiko Abe, Kosaku Tachikawa, Toshihiro Nakajima | 2006-07-04 |