| 7070477 |
Method of polishing semiconductor wafer |
Toshihiro Morisawa, Kosaku Tachikawa, Toshihiro Nakajima |
2006-07-04 |
| 6995058 |
Semiconductor memory device and manufacturing method thereof |
Kazufumi Suenaga, Kiyoshi Ogata, Kazuhiko Horikoshi, Jun Tanaka, Hisayuki Kato +1 more |
2006-02-07 |
| 6979650 |
Fabrication method of semiconductor integrated circuit device |
Shinichi Nakabayshi, Hirofumi Tsuchiyama, Masaki Hiyama, Takashi Nishiguchi |
2005-12-27 |
| 6579754 |
Semiconductor memory device having ferroelectric film and manufacturing method thereof |
Kazufumi Suenaga, Kiyoshi Ogata, Kazuhiko Horikoshi, Jun Tanaka, Hisayuki Kato +1 more |
2003-06-17 |
| 6514864 |
Fabrication method for semiconductor integrated circuit device |
Shinichi Nakabayashi, Katsuhiro Ota |
2003-02-04 |
| 6468817 |
Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby |
Shinichi Nakabayashi, Hirofumi Tsuchiyama, Yukio Kenbo, Yoshiteru Katsumura |
2002-10-22 |
| 6445025 |
Semiconductor memory device and manufacturing method thereof |
Kazufumi Suenaga, Kiyoshi Ogata, Kazuhiko Horikoshi, Jun Tanaka, Hisayuki Kato +1 more |
2002-09-03 |
| 6326216 |
Process for producing semiconductor integrated circuit device |
Hisayuki Kato, Shinji Nishihara, Masahito Yamazaki, Keiichi Yoshizumi |
2001-12-04 |
| 6239457 |
Semiconductor memory device and manufacturing method thereof |
Kazufumi Suenaga, Kiyoshi Ogata, Kazuhiko Horikoshi, Jun Tanaka, Hisayuki Kato +1 more |
2001-05-29 |
| 5856917 |
Electric power device with improved power factor |
Kenichi Aonuma, Shigetaka Maeyama, Hiromitsu Hirayama, Hiroko Hirayama, heiress, Hiroshi Hirayama |
1999-01-05 |
