| 7604925 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
2009-10-20 |
| 7598020 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
2009-10-06 |
| 7277155 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
2007-10-02 |
| 7012671 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
2006-03-14 |
| 6806970 |
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same |
Takenori Hirose, Minori Noguchi, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama |
2004-10-19 |
| 6753972 |
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same |
Takenori Hirose, Minori Noguchi, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama |
2004-06-22 |
| 6485891 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
2002-11-26 |
| 6468817 |
Semiconductor integrated circuit device manufacturing method including chemical mechanical polishing, and detection and evaluation of microscratches caused thereby |
Shinichi Nakabayashi, Hisahiko Abe, Hirofumi Tsuchiyama, Yoshiteru Katsumura |
2002-10-22 |
| 6335146 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
2002-01-01 |
| 6016187 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
2000-01-18 |
| 5767949 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
1998-06-16 |
| 5526094 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
1996-06-11 |
| 5329333 |
Exposure apparatus and method |
Minori Noguchi, Yoshitada Oshida, Masataka Shiba, Yasuhiro Yoshitaka, Makoto Murayama |
1994-07-12 |
| 4504045 |
Wafer transforming device |
Nobuyuki Akiyama, Mitsuyoshi Koizumi, Asahiro Kuni |
1985-03-12 |