Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12292330 | Spectrometry apparatus | Kaifeng Zhang, Masahiro Watanabe | 2025-05-06 |
| 11733264 | Cantilever, scanning probe microscope, and measurement method using scanning probe microscope | Kaifeng Zhang, Tomonori Saeki | 2023-08-22 |
| 10393509 | Pattern height measurement device and charged particle beam device | Hiroki Kawada, Katsuhiro Sasada, Shou Takami | 2019-08-27 |
| 9304145 | Inspection method and its apparatus for thermal assist type magnetic head element | Kaifeng Zhang, Masahiro Watanabe, Toshinori Sugiyama, Akira TOBITA | 2016-04-05 |
| 8787134 | Thermally assisted magnetic recording head inspection method and apparatus | Kaifeng Zhang, Masahiro Watanabe, Shinji Homma, Tsuneo Nakagomi, Teruaki Tokutomi +2 more | 2014-07-22 |
| 8713710 | Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus | Kaifeng Zhang, Masahiro Watanabe, Tsuneo Nakagomi, Shinji Honma, Teruaki Tokutomi +2 more | 2014-04-29 |
| 8638430 | Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium | Hideaki Sasazawa, Shigeru Serikawa | 2014-01-28 |
| 8621659 | Cantilever for magnetic force microscope and method of manufacturing the same | Kaifeng Zhang, Masahiro Watanabe, Tetsuya Matsui, Tsuneo Nakagomi, Teruaki Tokutomi | 2013-12-31 |
| 8483035 | Thermally assisted magnetic recording head inspection method and apparatus | Kaifeng Zhang, Masahiro Watanabe, Shinji Homma, Tsuneo Nakagomi, Teruaki Tokutomi +2 more | 2013-07-09 |
| 8411928 | Scatterometry method and device for inspecting patterned medium | Hideaki Sasazawa, Minoru Yoshida, Keiya Saito, Shigeru Serikawa | 2013-04-02 |
| 8279431 | Spectral detection method and device, and defect inspection method and apparatus using the same | Minoru Yoshida, Hideaki Sasazawa, Yasuhiro Yoshitake | 2012-10-02 |
| 8259414 | Magnetic recording disk having aligning pattern and method for aligning thereof | Yasuhiro Yoshitake | 2012-09-04 |
| 8260029 | Pattern shape inspection method and apparatus thereof | Keiya Saito, Hideaki Sasazawa | 2012-09-04 |
| 8148705 | Method and apparatus for inspecting defects of patterns formed on a hard disk medium | Masahiro Watanabe, Yasuhiro Yoshitake | 2012-04-03 |
| 8040772 | Method and apparatus for inspecting a pattern shape | Keiya Saito, Hideaki Sasazawa | 2011-10-18 |
| 7969567 | Method and device for detecting shape of surface of medium | Minoru Yoshida, Hideaki Sasazawa, Shigeru Serikawa | 2011-06-28 |
| 7243441 | Method and apparatus for measuring depth of holes formed on a specimen | Masahiro Watanabe, Yukio Kembo, Yoshiyuki Nagano, Takafumi Morimoto | 2007-07-17 |
| 7119908 | Method and apparatus for measuring thickness of thin film and device manufacturing method using same | Mineo Nomoto, Keiya Saito | 2006-10-10 |
| 7057744 | Method and apparatus for measuring thickness of thin film and device manufacturing method using same | Mineo Nomoto, Keiya Saito | 2006-06-06 |
| 7020306 | Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device | Hiroyuki Kojima, Mineo Nomoto, Susumu Aiuchi | 2006-03-28 |
| 6987874 | Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same | Mineo Nomoto | 2006-01-17 |
| 6897079 | Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same | Mineo Nomoto, Hiroyuki Kojima, Hidemi Sato | 2005-05-24 |
| 6806970 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-10-19 |
| 6794206 | Method of polishing a film | Mineo Nomoto, Hiroyuki Kojima, Hidemi Sato | 2004-09-21 |
| 6753972 | Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same | Minori Noguchi, Yukio Kenbo, Shunji Maeda, Takanori Ninomiya, Hirofumi Tsuchiyama | 2004-06-22 |