Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8781758 | Optical inspection method and its apparatus | Bin Abdulrashid FARIZ, Keiji Kato | 2014-07-15 |
| 8638430 | Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium | Hideaki Sasazawa, Takenori Hirose | 2014-01-28 |
| 8411928 | Scatterometry method and device for inspecting patterned medium | Hideaki Sasazawa, Takenori Hirose, Minoru Yoshida, Keiya Saito | 2013-04-02 |
| 8253935 | Disk surface inspection apparatus, inspection system thereof, and inspection method thereof | Tatsuo Hariyama, Hideaki Sasazawa, Minoru Yoshida | 2012-08-28 |
| 8018585 | Surface defect inspecting apparatus with defect detection optical system and defect-detected image processing | Tatsuo Hariyama, Minoru Yoshida | 2011-09-13 |
| 7969567 | Method and device for detecting shape of surface of medium | Minoru Yoshida, Takenori Hirose, Hideaki Sasazawa | 2011-06-28 |
| 7898652 | Method and apparatus for detecting defects on a disk surface | Tatsuo Hariyama, Hideaki Sasazawa, Minoru Yoshida | 2011-03-01 |
| 7612888 | Method and apparatus for measuring heterodyne optical interference utilizing adjustable polarizing plate | — | 2009-11-03 |
| 6295131 | Interference detecting system for use in interferometer | Tuneo Yamaba, Kenji Aikou, Hideo Ishimori | 2001-09-25 |