Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10352879 | X-ray inspection method and device | Toshiyuki Nakao, Yuta Urano, Kaifeng Zhang | 2019-07-16 |
| 8736830 | Pattern inspection device of substrate surface and pattern inspection method of the same | Masahiro Watanabe, Toshihiko Nakata, Yasuhiro Yoshitake, Minoru Yoshida | 2014-05-27 |
| 8638430 | Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium | Takenori Hirose, Shigeru Serikawa | 2014-01-28 |
| 8547545 | Method and apparatus for inspecting a surface of a substrate | Takayuki Ishiguro, Kiyotaka HORIE, Yu YANAKA | 2013-10-01 |
| 8411928 | Scatterometry method and device for inspecting patterned medium | Takenori Hirose, Minoru Yoshida, Keiya Saito, Shigeru Serikawa | 2013-04-02 |
| 8359661 | Magnetic device inspection apparatus and magnetic device inspection method | Takehiro Tachizaki, Masahiro Watanabe, Minoru Yoshida, Tsuneo Nakagomi, Teruaki Tokutomi | 2013-01-22 |
| 8279431 | Spectral detection method and device, and defect inspection method and apparatus using the same | Takenori Hirose, Minoru Yoshida, Yasuhiro Yoshitake | 2012-10-02 |
| 8260029 | Pattern shape inspection method and apparatus thereof | Keiya Saito, Takenori Hirose | 2012-09-04 |
| 8253935 | Disk surface inspection apparatus, inspection system thereof, and inspection method thereof | Tatsuo Hariyama, Minoru Yoshida, Shigeru Serikawa | 2012-08-28 |
| 8040772 | Method and apparatus for inspecting a pattern shape | Keiya Saito, Takenori Hirose | 2011-10-18 |
| 7969567 | Method and device for detecting shape of surface of medium | Minoru Yoshida, Takenori Hirose, Shigeru Serikawa | 2011-06-28 |
| 7898652 | Method and apparatus for detecting defects on a disk surface | Tatsuo Hariyama, Minoru Yoshida, Shigeru Serikawa | 2011-03-01 |
| 7816062 | Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern | Wataru Nagatomo, Hidetoshi Morokuma, Atsushi Miyamoto | 2010-10-19 |
| 7449689 | Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method | Wataru Nagatomo, Ryoichi Matsuoka, Takumichi Sutani, Akiyuki Sugiyama, Yasuhiro Yoshitake | 2008-11-11 |
| 7355143 | Circuit board production method and its apparatus | Hiroyuki Nakano, Toshihiko Nakata, Masayoshi Serizawa | 2008-04-08 |
| 7336816 | Method and apparatus for measuring shape of bumps | Mineo Nomoto, Masatoshi Yamaga, Chikara Iwata, Masashi Uehara | 2008-02-26 |
| 7273685 | Method for controlling semiconductor device production process and a method for producing semiconductor devices | Yasuhiro Yoshitake | 2007-09-25 |
| 7092348 | Optical recording apparatus capable of changing the length of synchronization portions | Tohishiko Nakata, Masahiro Watanabe, Shunichi Matsumoto | 2006-08-15 |
| 7084990 | Method and its apparatus for measuring size and shape of fine patterns | Tohishiko Nakata, Masahiro Watanabe, Shunichi Matsumoto | 2006-08-01 |
| 7075884 | Optical recording apparatus capable of changing the length of synchronization portions | Tohishiko Nakata, Masahiro Watanabe, Shunichi Matsumoto | 2006-07-11 |
| 6831277 | Method for measuring dimensions and alignment of thin film magnetic head and apparatus therefor | Toshihiko Nakata, Kenji Furusawa, Minako Morisato, Hideo Yamakura, Toshio Tamura | 2004-12-14 |
| 6631547 | Manufacturing method for thin film magnetic heads | Minoru Yoshida, Toshihiko Nakata, Minoru Yamasaka | 2003-10-14 |
| 5780866 | Method and apparatus for automatic focusing and a method and apparatus for three dimensional profile detection | Hisae Yamamura, Yukio Matsuyama, Takanori Ninomiya | 1998-07-14 |