| 12412275 |
Pattern matching device, pattern measurement system, and non-transitory computer-readable medium |
Liang Li, Yuichi Abe |
2025-09-09 |
| 11669953 |
Pattern matching device and computer program for pattern matching |
Yuichi Abe, Mitsuji Ikeda |
2023-06-06 |
| 10535129 |
Pattern matching apparatus and computer program |
Masahiro Kitazawa, Mitsuji Ikeda, Yuichi Abe, Junichi Taguchi |
2020-01-14 |
| 10255519 |
Inspection apparatus and method using pattern matching |
Yuichi Abe |
2019-04-09 |
| 9619727 |
Matching process device, matching process method, and inspection device employing same |
Yuichi Abe, Hiroyuki Ushiba |
2017-04-11 |
| 8971627 |
Template matching processing device and template matching processing program |
Jun'ichi Taguchi, Mitsuji Ikeda, Yuichi Abe, Masahiro Kitazawa |
2015-03-03 |
| 8885950 |
Pattern matching method and pattern matching apparatus |
Yuichi Abe, Mitsuji Ikeda |
2014-11-11 |
| 8881067 |
Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device |
Atsushi Miyamoto, Hidetoshi Morokuma |
2014-11-04 |
| RE45224 |
Method and apparatus for creating imaging recipe |
Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani |
2014-10-28 |
| RE45204 |
Method and apparatus for creating imaging recipe |
Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani |
2014-10-21 |
| 8853630 |
Scanning electron microscope and a method for imaging a specimen using the same |
Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma |
2014-10-07 |
| 8642957 |
Scanning electron microscope and a method for imaging a specimen using the same |
Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma |
2014-02-04 |
| 8356260 |
Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device |
Atsushi Miyamoto, Hidetoshi Morokuma |
2013-01-15 |
| 8214166 |
Method and its system for calibrating measured data between different measuring tools |
Maki Tanaka |
2012-07-03 |
| 8158938 |
Scanning electron microscope and a method for imaging a specimen using the same |
Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma |
2012-04-17 |
| 7816062 |
Method and apparatus for semiconductor device production process monitoring and method and apparatus for estimating cross sectional shape of a pattern |
Hidetoshi Morokuma, Atsushi Miyamoto, Hideaki Sasazawa |
2010-10-19 |
| 7685560 |
Method and apparatus for monitoring exposure process |
Chie Shishido, Hidetoshi Morokuma |
2010-03-23 |
| 7633061 |
Method and apparatus for measuring pattern dimensions |
Maki Tanaka, Chie Shishido |
2009-12-15 |
| 7615746 |
Method and apparatus for evaluating pattern shape of a semiconductor device |
Atsushi Miyamoto, Ryoichi Matsuoka |
2009-11-10 |
| 7559047 |
Method and apparatus for creating imaging recipe |
Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani |
2009-07-07 |
| 7449689 |
Dimension measuring SEM system, method of evaluating shape of circuit pattern and a system for carrying out the method |
Ryoichi Matsuoka, Takumichi Sutani, Akiyuki Sugiyama, Yasuhiro Yoshitake, Hideaki Sasazawa |
2008-11-11 |
| 7365322 |
Method and apparatus for arranging recipe of scanning electron microscope and apparatus for evaluating shape of semiconductor device pattern |
Atsushi Miyamoto, Ryoichi Matsuoka, Hidetoshi Morokuma, Takumichi Sutani |
2008-04-29 |
| 6929892 |
Method of monitoring an exposure process |
Chie Shishido, Hidetoshi Morokuma, Yuki Ojima, Maki Tanaka |
2005-08-16 |