Issued Patents All Time
Showing 1–25 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508047 | Charged particle microscope device and wide-field image generation method | Mitsutoshi KOBAYASHI, Yoshinobu Hoshino | 2022-11-22 |
| 10331249 | Touch sensor substrate, touch panel, display device, and method for producing touch sensor substrate | Hiroki Goto, Gen Nakamura | 2019-06-25 |
| 10242489 | Image processing device, image processing method and image processing system | Hanae Yoshida | 2019-03-26 |
| 10186399 | Scanning electron microscope | Mayuka Osaki, Chie Shishido, Hitoshi Namai, Fumihiro Sasajima, Makoto Suzuki +1 more | 2019-01-22 |
| 9859093 | Method of improving quality of scanning charged particle microscope image, and scanning charged particle microscope apparatus | Kenji Nakahira | 2018-01-02 |
| 9852881 | Scanning electron microscope system, pattern measurement method using same, and scanning electron microscope | Chie Shishido, Takuma Yamamoto, Shinya Yamada | 2017-12-26 |
| 9824853 | Electron microscope device and imaging method using same | Mitsutoshi KOBAYASHI, Kenji Nakahira | 2017-11-21 |
| 9741530 | Charged-particle-beam device, specimen-image acquisition method, and program recording medium | Yusuke Ominami, Kenji Nakahira, Shinsuke Kawanishi | 2017-08-22 |
| 9671223 | Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time | Chie Shishido, Katsuhiro Sasada | 2017-06-06 |
| 9354049 | Shape measurement method, and system therefor | Chie Shishido, Atsushi Miyamoto, Akira Hamamatsu, Manabu Yano | 2016-05-31 |
| 9190240 | Charged particle microscope apparatus and image acquisition method of charged particle microscope apparatus utilizing image correction based on estimated diffusion of charged particles | — | 2015-11-17 |
| 9000365 | Pattern measuring apparatus and computer program | Yuzuru Mochizuki, Miki Isawa, Satoru Yamaguchi | 2015-04-07 |
| 8671366 | Estimating shape based on comparison between actual waveform and library in lithography process | Norio Hasegawa, Chie Shishido, Mayuka Osaki | 2014-03-11 |
| 8559000 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2013-10-15 |
| 8502145 | Electron microscope system and method for evaluating film thickness reduction of resist patterns | Mayuka Iwasaki, Chie Shishido | 2013-08-06 |
| 8481936 | Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system | Chie Shishido, Atsushi Miyamoto | 2013-07-09 |
| 8274651 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2012-09-25 |
| 8217348 | Electron microscope system and method for evaluating film thickness reduction of resist patterns | Mayuka Iwasaki, Chie Shishido | 2012-07-10 |
| 8212227 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Yasutsugu Usami | 2012-07-03 |
| 8214166 | Method and its system for calibrating measured data between different measuring tools | Wataru Nagatomo | 2012-07-03 |
| 8110800 | Scanning electron microscope system and method for measuring dimensions of patterns formed on semiconductor device by using the system | Chie Shishido, Atsushi Miyamoto | 2012-02-07 |
| 8040503 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2011-10-18 |
| 8022356 | Sample and method for evaluating resolution of scanning electron microscope, and electron scanning microscope | Mayuka Oosaki, Chie Shishido, Hiroki Kawada | 2011-09-20 |
| 7957579 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Hiroshi Miyai +2 more | 2011-06-07 |
| 7952074 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2011-05-31 |