Issued Patents All Time
Showing 51–75 of 97 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7166839 | Apparatus for measuring a three-dimensional shape | Chie Shishido, Yuji Takagi | 2007-01-23 |
| 7164128 | Method and apparatus for observing a specimen | Atsushi Miyamoto, Hidetoshi Morokuma | 2007-01-16 |
| 7133550 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Hiroshi Miyai +2 more | 2006-11-07 |
| 7122796 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2006-10-17 |
| 7116816 | Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Hiroshi Morioka, Kenji Watanabe +2 more | 2006-10-03 |
| 7116817 | Method and apparatus for inspecting a semiconductor device | Masahiro Watanabe, Kenji Watanabe, Mari Nozoe, Hiroshi Miyai | 2006-10-03 |
| 7061602 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2006-06-13 |
| 7049587 | Apparatus for inspecting a specimen | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Munenori Fukunishi, Hiroshi Miyai +2 more | 2006-05-23 |
| 7026830 | Method and apparatus for inspecting integrated circuit pattern | Hiroyuki Shinada, Mari Nozoe, Haruo Yoda, Kimiaki Ando, Katsuhiro Kuroda +12 more | 2006-04-11 |
| 6984589 | Method for determining etching process conditions and controlling etching process | Chie Shishido, Yuji Takagi | 2006-01-10 |
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Hiroshi Miyai +2 more | 2005-12-13 |
| 6952492 | Method and apparatus for inspecting a semiconductor device | Masahiro Watanabe, Kenji Watanabe, Mari Nozoe, Hiroshi Miyai | 2005-10-04 |
| 6929892 | Method of monitoring an exposure process | Chie Shishido, Hidetoshi Morokuma, Yuki Ojima, Wataru Nagatomo | 2005-08-16 |
| 6919577 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Yasutsugu Usami | 2005-07-19 |
| 6913861 | Method of observing exposure condition for exposing semiconductor device and its apparatus and method of manufacturing semiconductor device | Chie Shishido, Osamu Komuro, Hidetoshi Morokuma, Ryo Nakagaki, Yuuji Takagi | 2005-07-05 |
| 6909930 | Method and system for monitoring a semiconductor device manufacturing process | Chie Shishido, Yuji Takagi, Masahiro Watanabe, Yasuhiro Yoshitake, Shunichi Matsumoto +3 more | 2005-06-21 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Asahiro Kuni, Hiroshi Miyai +2 more | 2005-05-24 |
| 6888959 | Method of inspecting a semiconductor device and an apparatus thereof | Akira Hamamatsu, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kenji Oka +4 more | 2005-05-03 |
| 6885012 | Convergent charged particle beam apparatus and inspection method using same | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Taku Ninomiya | 2005-04-26 |
| 6841403 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2005-01-11 |
| 6828554 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-12-07 |
| 6797526 | Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data | Shunji Maeda, Minori Noguchi, Takafumi Okabe, Yuji Takagi, Chie Shishido | 2004-09-28 |
| 6753518 | Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Yasutsugu Usami | 2004-06-22 |
| 6744057 | Convergent charged particle beam apparatus and inspection method using same | Masahiro Watanabe, Takashi Hiroi, Hiroyuki Shinada, Taku Ninomiya | 2004-06-01 |
| 6717142 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Masahiro Watanabe, Asahiro Kuni, Yukio Matsuyama, Yuji Takagi +3 more | 2004-04-06 |