Issued Patents All Time
Showing 25 most recent of 39 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7957579 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2011-06-07 |
| 7894658 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2011-02-22 |
| 7457453 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2008-11-25 |
| 7439504 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2008-10-21 |
| 7269280 | Method and its apparatus for inspecting a pattern | Takashi Hiroi, Masahiro Watanabe, Maki Tanaka, Chie Shishido, Hiroshi Miyai +2 more | 2007-09-11 |
| 7266235 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2007-09-04 |
| 7260256 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Mari Nozoe +2 more | 2007-08-21 |
| 7133550 | Pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Aritoshi Sugimoto, Maki Tanaka +2 more | 2006-11-07 |
| 7122796 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Yukio Matsuyama, Yuji Takagi +3 more | 2006-10-17 |
| 7049587 | Apparatus for inspecting a specimen | Takashi Hiroi, Masahiro Watanabe, Maki Tanaka, Munenori Fukunishi, Hiroshi Miyai +2 more | 2006-05-23 |
| 6975754 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Maki Tanaka, Hiroshi Miyai +2 more | 2005-12-13 |
| 6940069 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2005-09-06 |
| 6898305 | Circuit pattern inspection method and apparatus | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Maki Tanaka, Hiroshi Miyai +2 more | 2005-05-24 |
| 6828554 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Yukio Matsuyama, Yuji Takagi +3 more | 2004-12-07 |
| 6717142 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Yukio Matsuyama, Yuji Takagi +3 more | 2004-04-06 |
| 6614022 | Pattern inspection method and apparatus using electron beam | Takashi Hiroi, Masahiro Watanabe, Chie Shishido, Hiroyuki Shinada, Yasuhiro Gunji +1 more | 2003-09-02 |
| 6587581 | Visual inspection method and apparatus therefor | Yukio Matsuyama, Yuji Takagi, Takashi Hiroi, Maki Tanaka, Junzou Azuma +2 more | 2003-07-01 |
| 6507029 | Sample processing apparatus and method for removing charge on sample through light irradiation | Norimasa Nishimura, Akira Shimase, Junzou Azuma, Hiroya Koshishiba | 2003-01-14 |
| 6465781 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Norimasa Nishimura, Akira Shimase, Masahiro Watanabe, Taku Ninomiya, Hiroshi Miyai | 2002-10-15 |
| 6376854 | Method of inspecting a pattern on a substrate | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Maki Tanaka +8 more | 2002-04-23 |
| 6373054 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Yukio Matsuyama, Yuji Takagi +3 more | 2002-04-16 |
| 6347150 | Method and system for inspecting a pattern | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Hiroyuki Shinada, Mari Nozoe +2 more | 2002-02-12 |
| 6236057 | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Maki Tanaka +8 more | 2001-05-22 |
| 6172365 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Takashi Hiroi, Maki Tanaka, Masahiro Watanabe, Yukio Matsuyama, Yuji Takagi +3 more | 2001-01-09 |
| 6087673 | Method of inspecting pattern and apparatus thereof | Chie Shishido, Takashi Hiroi, Haruo Yoda, Masahiro Watanabe, Maki Tanaka +8 more | 2000-07-11 |