Issued Patents All Time
Showing 1–25 of 52 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12347718 | Wafer conveyance unit and wafer conveyance method | Toshimichi Ishizuka, Masataka IKESU | 2025-07-01 |
| 12340504 | Semiconductor inspecting method and semiconductor inspecting device | Xiangguang Mao, Akihito Uchikado | 2025-06-24 |
| 12222387 | Semiconductor device inspection method and semiconductor device inspection apparatus | Norimichi Chinone, Tomonori Nakamura, Shigeru Eura | 2025-02-11 |
| 11579184 | Analysis method, analysis device, analysis program, and recording medium for recording analysis program | Kazuhiro Hotta | 2023-02-14 |
| 11181361 | Optical measurement method, optical measurement device, optical measurement program, and recording medium for recording optical measurement program | Kazuhiro Hotta | 2021-11-23 |
| 10955458 | Semiconductor device inspection apparatus and semiconductor device inspection method | Toru Matsumoto | 2021-03-23 |
| 10923404 | Inspection method, inspection device, and marking forming method | Shinsuke Suzuki | 2021-02-16 |
| 10586743 | Inspection method, inspection device, and marking forming method | Shinsuke Suzuki | 2020-03-10 |
| 7865012 | Semiconductor failure analysis apparatus which acquires a failure observed image, failure analysis method, and failure analysis program | Toshiyuki Majima, Hirotoshi Terada, Kazuhiro Hotta | 2011-01-04 |
| 7805691 | Semiconductor failure analysis apparatus, failure analysis method, and failure analysis program | Toshiyuki Majima, Hirotoshi Terada, Kazuhiro Hotta | 2010-09-28 |
| 7517707 | Manufacturing method of semiconductor integrated circuit device and probe card | Masayoshi Okamoto, Hideyuki Matsumoto, Shingo Yorisaki, Akio Hasebe, Yasuhiro Motoyama | 2009-04-14 |
| 7301146 | Probe driving method, and probe apparatus | Satoshi Tomimatsu, Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto +2 more | 2007-11-27 |
| 7271015 | Manufacturing method of semiconductor integrated circuit device and probe card | Masayoshi Okamoto, Hideyuki Matsumoto, Shingo Yorisaki, Akio Hasebe, Yasuhiro Motoyama | 2007-09-18 |
| 6960765 | Probe driving method, and probe apparatus | Satoshi Tomimatsu, Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto +2 more | 2005-11-01 |
| 6753253 | Method of making wiring and logic corrections on a semiconductor device by use of focused ion beams | Takahiko Takahashi, Fumikazu Itoh, Mikio Hongo, Satoshi Haraichi, Hiroshi Yamaguchi | 2004-06-22 |
| 6507029 | Sample processing apparatus and method for removing charge on sample through light irradiation | Norimasa Nishimura, Junzou Azuma, Asahiro Kuni, Hiroya Koshishiba | 2003-01-14 |
| 6476387 | Method and apparatus for observing or processing and analyzing using a charged beam | Norimasa Nishimura, Junzou Azuma, Yuichi Hamamura, Michinobu Mizumura, Yasuhiro Koizumi +1 more | 2002-11-05 |
| 6465781 | Method and apparatus for inspecting or measuring a sample based on charged-particle beam imaging, and a charged-particle beam apparatus | Norimasa Nishimura, Masahiro Watanabe, Asahiro Kuni, Taku Ninomiya, Hiroshi Miyai | 2002-10-15 |
| 6344115 | Pattern forming method using charged particle beam process and charged particle beam processing system | Junzou Azuma, Yuichi Hamamura, Hidemi Koike | 2002-02-05 |
| 6303932 | Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam | Yuichi Hamamura, Junzou Azuma, Michinobu Mizumura, Norimasa Nishimura, Yasuhiro Koizumi +1 more | 2001-10-16 |
| 5976328 | Pattern forming method using charged particle beam process and charged particle beam processing system | Junzou Azuma, Yuichi Hamamura, Hidemi Koike | 1999-11-02 |
| 5952658 | Method and system for judging milling end point for use in charged particle beam milling system | Yuichi Hamamura, Junzou Azuma, Michinobu Mizumura | 1999-09-14 |
| 5824598 | IC wiring connecting method using focused energy beams | Hiroshi Yamaguchi, Mikio Hongo, Tateoki Miyauchi, Satoshi Haraichi, Takahiko Takahashi +1 more | 1998-10-20 |
| 5825035 | Processing method and apparatus using focused ion beam generating means | Michinobu Mizumura, Yuuichi Hamamura, Junzou Azuma, Takashi Kamimura, Fumikazu Itoh +3 more | 1998-10-20 |
| 5683547 | Processing method and apparatus using focused energy beam | Junzou Azuma, Fumikazu Itoh, Satoshi Haraichi, Junichi Mori, Takahiko Takahashi +1 more | 1997-11-04 |