| 10614391 |
Method and apparatus for work quality control |
Kei Imazawa, Shigenori Tanaka, Kouichirou Tada, Isamu Momose, Yusaku Fukaya |
2020-04-07 |
| 8995748 |
Defect image processing apparatus, defect image processing method, semiconductor defect classifying apparatus, and semiconductor defect classifying method |
Tsunehiro Sakai, Shigeki Kurihara, Yutaka Tandai, Tamao Ishikawa, Tomohiro Funakoshi +2 more |
2015-03-31 |
| 8675949 |
Reviewed defect selection processing method, defect review method, reviewed defect selection processing tool, and defect review tool |
Yuji Takagi, Minoru Harada |
2014-03-18 |
| 8621400 |
Method of evaluating systematic defect, and apparatus therefor |
Yuji Takagi |
2013-12-31 |
| 8612811 |
Defective-ratio predicting method, defective-ratio predicting program, managing method for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device |
Chizu Matsumoto, Yoshiyuki Tsunoda, Kazuyuki Tsunokuni |
2013-12-17 |
| 7945410 |
Semiconductor device yield prediction system and method |
Natsuyo Morioka, Seiji Ishikawa, Katsumi Ikegaya, Yasunori Yamaguchi, Kazuo Ito |
2011-05-17 |
| 7352890 |
Method for analyzing circuit pattern defects and a system thereof |
Atsushi Shimoda, Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Kenji Watanabe +2 more |
2008-04-01 |
| 7301146 |
Probe driving method, and probe apparatus |
Satoshi Tomimatsu, Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto +2 more |
2007-11-27 |
| 7062081 |
Method and system for analyzing circuit pattern defects |
Atsushi Shimoda, Ichirou Ishimaru, Yuji Takagi, Takuo Tamura, Kenji Watanabe +2 more |
2006-06-13 |
| 6960765 |
Probe driving method, and probe apparatus |
Satoshi Tomimatsu, Hidemi Koike, Junzo Azuma, Tohru Ishitani, Aritoshi Sugimoto +2 more |
2005-11-01 |
| 6895346 |
Method for test conditions |
Takaaki Kumazawa, Hisao Asakura, Kazuyuki Tsunokuni, Aritoshi Sugimoto |
2005-05-17 |
| 6841405 |
Photomask for test wafers |
Takaaki Kumazawa, Hisao Asakura, Aritoshi Sugimoto, Kazuyuki Tsunokuni |
2005-01-11 |
| 6780660 |
System for testing electronic devices |
Takaaki Kumazawa, Hisao Asakura, Aritoshi Sugimoto, Kazuyuki Tsunokuni |
2004-08-24 |
| 6770496 |
Method of testing electronic devices |
Takaaki Kumazawa, Hisao Asakura, Aritoshi Sugimoto, Kazuyuki Tsunokuni |
2004-08-03 |
| 6771077 |
Method of testing electronic devices indicating short-circuit |
Takaaki Kumazawa, Hisao Asakura, Aritoshi Sugimoto, Kazuyuki Tsunokuni |
2004-08-03 |
| 6476387 |
Method and apparatus for observing or processing and analyzing using a charged beam |
Norimasa Nishimura, Akira Shimase, Junzou Azuma, Michinobu Mizumura, Yasuhiro Koizumi +1 more |
2002-11-05 |
| 6344115 |
Pattern forming method using charged particle beam process and charged particle beam processing system |
Junzou Azuma, Akira Shimase, Hidemi Koike |
2002-02-05 |
| 6303932 |
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam |
Akira Shimase, Junzou Azuma, Michinobu Mizumura, Norimasa Nishimura, Yasuhiro Koizumi +1 more |
2001-10-16 |
| 5976328 |
Pattern forming method using charged particle beam process and charged particle beam processing system |
Junzou Azuma, Akira Shimase, Hidemi Koike |
1999-11-02 |
| 5952658 |
Method and system for judging milling end point for use in charged particle beam milling system |
Akira Shimase, Junzou Azuma, Michinobu Mizumura |
1999-09-14 |