| 6587581 |
Visual inspection method and apparatus therefor |
Yukio Matsuyama, Yuji Takagi, Takashi Hiroi, Maki Tanaka, Asahiro Kuni +2 more |
2003-07-01 |
| 6507029 |
Sample processing apparatus and method for removing charge on sample through light irradiation |
Norimasa Nishimura, Akira Shimase, Asahiro Kuni, Hiroya Koshishiba |
2003-01-14 |
| 6476387 |
Method and apparatus for observing or processing and analyzing using a charged beam |
Norimasa Nishimura, Akira Shimase, Yuichi Hamamura, Michinobu Mizumura, Yasuhiro Koizumi +1 more |
2002-11-05 |
| 6344115 |
Pattern forming method using charged particle beam process and charged particle beam processing system |
Akira Shimase, Yuichi Hamamura, Hidemi Koike |
2002-02-05 |
| 6303932 |
Method and its apparatus for detecting a secondary electron beam image and a method and its apparatus for processing by using focused charged particle beam |
Yuichi Hamamura, Akira Shimase, Michinobu Mizumura, Norimasa Nishimura, Yasuhiro Koizumi +1 more |
2001-10-16 |
| 5976328 |
Pattern forming method using charged particle beam process and charged particle beam processing system |
Akira Shimase, Yuichi Hamamura, Hidemi Koike |
1999-11-02 |
| 5952658 |
Method and system for judging milling end point for use in charged particle beam milling system |
Akira Shimase, Yuichi Hamamura, Michinobu Mizumura |
1999-09-14 |
| 5825035 |
Processing method and apparatus using focused ion beam generating means |
Michinobu Mizumura, Yuuichi Hamamura, Akira Shimase, Takashi Kamimura, Fumikazu Itoh +3 more |
1998-10-20 |
| 5683547 |
Processing method and apparatus using focused energy beam |
Fumikazu Itoh, Satoshi Haraichi, Akira Shimase, Junichi Mori, Takahiko Takahashi +1 more |
1997-11-04 |
| 5583344 |
Process method and apparatus using focused ion beam generating means |
Michinobu Mizumura, Yuuichi Hamamura, Akira Shimase, Takashi Kamimura, Fumikazu Itoh +3 more |
1996-12-10 |
| 5504340 |
Process method and apparatus using focused ion beam generating means |
Michinobu Mizumura, Yuuichi Hamamura, Akira Shimase, Takashi Kamimura, Fumikazu Itoh +3 more |
1996-04-02 |
| 5447614 |
Method of processing a sample using a charged beam and reactive gases and system employing the same |
Yuuichi Hamamura, Satoshi Haraichi, Akira Shimase, Fumikazu Itoh, Toshio Yamada +2 more |
1995-09-05 |
| 5439763 |
Optical mask and method of correcting the same |
Akira Shimase, Satoshi Haraichi, Fumikazu Itoh, Yasuhiro Koizumi |
1995-08-08 |
| 5358806 |
Phase shift mask, method of correcting the same and apparatus for carrying out the method |
Satoshi Haraichi, Fumikazu Itoh, Akira Shimase, Hiroshi Yamaguchi, Yasuhiro Koizumi |
1994-10-25 |
| 5342448 |
Apparatus for processing a sample using a charged beam and reactive gases |
Yuuichi Hamamura, Satoshi Haraichi, Akira Shimase, Fumikazu Itoh, Toshio Yamada +2 more |
1994-08-30 |
| 5223109 |
Ion beam processing method and apparatus |
Fumikazu Itoh, Akira Shimase, Satoshi Haraichi |
1993-06-29 |
| 5134965 |
Processing apparatus and method for plasma processing |
Mitsuo Tokuda, Toru Otsubo, Yasuhiro Yamaguchi, Ichirou Sasaki |
1992-08-04 |
| 4985109 |
Apparatus for plasma processing |
Toru Otsubo, Mitsuo Tokuda, Yasuhiro Yamaguchi, Ichirou Sasaki, Kazuhiro Ohara +1 more |
1991-01-15 |