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Method and apparatus for specimen fabrication |
Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more |
2014-08-05 |
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Method and apparatus for processing a micro sample |
Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more |
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Method and apparatus for processing a microsample |
Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more |
2012-07-17 |
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Method and apparatus for specimen fabrication |
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2011-03-01 |
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Method and apparatus for processing a micro sample |
Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more |
2011-02-15 |
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Method and apparatus for processing a micro sample |
Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more |
2009-06-23 |
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Method and apparatus for processing a micro sample |
Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more |
2008-12-30 |
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Method and apparatus for processing a micro sample |
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2008-12-16 |
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Method and apparatus for specimen fabrication |
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2007-09-11 |
| 7205554 |
Method and apparatus for processing a micro sample |
Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more |
2007-04-17 |
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Method and apparatus for processing a micro sample |
Muneyuki Fukuda, Yasuhiro Mitsui, Hidemi Koike, Satoshi Tomimatsu, Hiroyasu Shichi +2 more |
2007-04-17 |
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Method and apparatus for processing a micro sample |
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2005-08-09 |
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Method and apparatus for specimen fabrication |
Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Eiichi Seya +3 more |
2004-09-21 |
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Method and apparatus for processing a micro sample |
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2004-08-24 |
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Method and apparatus for specimen fabrication |
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2003-12-16 |
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Processing apparatus and method for plasma processing |
Junzou Azuma, Toru Otsubo, Yasuhiro Yamaguchi, Ichirou Sasaki |
1992-08-04 |
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Apparatus for plasma processing |
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1991-01-15 |