| 8796651 |
Method and apparatus for specimen fabrication |
Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Mitsuo Tokuda +3 more |
2014-08-05 |
| 7897936 |
Method and apparatus for specimen fabrication |
Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Mitsuo Tokuda +3 more |
2011-03-01 |
| 7791043 |
Stage mechanism, electron microscope having the stage mechanism and method of controlling positioning of stage mechanism |
Takashi Nagamatsu |
2010-09-07 |
| 7514683 |
Scanning electron microscope |
Kazuma Tanii, Yuji Kasai, Katsuhiro Sasada |
2009-04-07 |
| 7268356 |
Method and apparatus for specimen fabrication |
Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Mitsuo Tokuda +3 more |
2007-09-11 |
| 6943945 |
Two axis state for microscope |
Shuichi Nakagawa |
2005-09-13 |
| 6794663 |
Method and apparatus for specimen fabrication |
Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Mitsuo Tokuda +3 more |
2004-09-21 |
| 6664552 |
Method and apparatus for specimen fabrication |
Hiroyasu Shichi, Tohru Ishitani, Hidemi Koike, Kaoru Umemura, Mitsuo Tokuda +3 more |
2003-12-16 |
| 5601686 |
Wafer transport method |
Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more |
1997-02-11 |
| 5562800 |
Wafer transport method |
Yoshio Kawamura, Yoshifumi Kawamoto, Fumihiko Uchida, Kenichi Mizuishi, Natsuki Yokoyama +2 more |
1996-10-08 |
| 5420436 |
Methods for measuring optical system, and method and apparatus for exposure using said measuring method |
Massaaki Ito, Soichi Katagiri, Tsuneo Terasawa, Minoru Hidaka, Eiji Takeda +1 more |
1995-05-30 |
| 5235591 |
Stack type optical disc apparatus, sealed and separate type optical head therefor and optical disc medium |
Shigeru Nakamura, Seiichi Mita, Masuo Kasai, Masahiro Ojima, Hiroshi Yasuoka +5 more |
1993-08-10 |