| 7603194 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Kenichi Mizuishi, Yoshio Kawamura |
2009-10-13 |
| 7392106 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Kenichi Mizuishi, Yoshio Kawamura |
2008-06-24 |
| 7310563 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Kenichi Mizuishi, Yoshio Kawamura |
2007-12-18 |
| 7062344 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Kenichi Mizuishi, Yoshio Kawamura |
2006-06-13 |
| 6099598 |
Fabrication system and fabrication method |
Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Kenichi Mizuishi, Yoshio Kawamura |
2000-08-08 |
| 5981399 |
Method and apparatus for fabricating semiconductor devices |
Yoshio Kawamura, Tatuharu Yamamoto, Shigeo Moriyama, Yoshifumi Kawamoto, Natsuki Yokoyama +2 more |
1999-11-09 |
| 5858863 |
Fabrication system and method having inter-apparatus transporter |
Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Kenichi Mizuishi, Yoshio Kawamura |
1999-01-12 |
| 5820679 |
Fabrication system and method having inter-apparatus transporter |
Natsuki Yokoyama, Yoshifumi Kawamoto, Eiichi Murakami, Kenichi Mizuishi, Yoshio Kawamura |
1998-10-13 |
| 5689494 |
Surface atom fabrication method and apparatus |
Masakazu Ichikawa, Shigeyuki Hosoki, Shigeo Kato, Yoshihisa Fujisaki, Sumiko Fujisaki +5 more |
1997-11-18 |
| 5628828 |
Processing method and equipment for processing a semiconductor device having holder/carrier with flattened surface |
Yoshio Kawamura, Shigeo Moriyama, Tatuharu Yamamoto |
1997-05-13 |
| 5601686 |
Wafer transport method |
Yoshio Kawamura, Yoshifumi Kawamoto, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more |
1997-02-11 |
| 5562800 |
Wafer transport method |
Yoshio Kawamura, Yoshifumi Kawamoto, Kenichi Mizuishi, Natsuki Yokoyama, Eiichi Murakami +2 more |
1996-10-08 |
| 5416331 |
Surface atom fabrication method and apparatus |
Masakazu Ichikawa, Shigeyuki Hosoki, Shigeo Kato, Yoshihisa Fujisaki, Sumiko Fujisaki +5 more |
1995-05-16 |
| 5411430 |
Scanning optical device and method for making a hybrid scanning lens used therefor |
Takashi Nishimura, Akira Arimoto, Yoshinori Miyamura, Yumiko Anzai, Yoshimasa Kondo +1 more |
1995-05-02 |
| 4739161 |
Fine displacement transducer employing plural optical fibers |
Shigeo Moriyama |
1988-04-19 |
| 4380917 |
Tube-bending machine |
Kazuo Sato, Soji Takahashi |
1983-04-26 |