Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7260173 | Apparatus and method for detecting threats | Kyoichiro Wakayama, Hidehiro Okada, Yukiya Hattori | 2007-08-21 |
| 6831998 | Inspection system for circuit patterns and a method thereof | Hideaki Doi, Mitsunobu Isobe, Kazushi Yoshimura, Haruomi Kobayashi, Chie Shishido | 2004-12-14 |
| 6507029 | Sample processing apparatus and method for removing charge on sample through light irradiation | Norimasa Nishimura, Akira Shimase, Junzou Azuma, Asahiro Kuni | 2003-01-14 |
| 6072899 | Method and device of inspecting three-dimensional shape defect | Yoko Irie, Hideaki Doi, Mineo Nomoto | 2000-06-06 |
| 5629969 | X-ray imaging system | — | 1997-05-13 |
| 5351278 | X-ray tomography method and apparatus thereof | Mihoko Yoshimura | 1994-09-27 |
| 5051585 | Apparatus and method of pattern detection based on a scanning transmission electron microscope | Satoru Fushimi, Yasuo Nakagawa, Kozo Nakahata | 1991-09-24 |
| 5015097 | Method for inspecting filled state of via-holes filled with fillers and apparatus for carrying out the method | Mineo Nomoto, Takanori Ninomiya, Toshimitsu Hamada, Yasuo Nakagawa | 1991-05-14 |
| 4990776 | Electron microscope | Satoru Fushimi | 1991-02-05 |
| 4814615 | Method and apparatus for detecting defect in circuit pattern of a mask for X-ray exposure | Satoru Fushimi, Yasuo Nakagawa, Asahiro Kuni, Hitoshi Kubota | 1989-03-21 |