Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8659761 | Method and apparatus for measuring displacement of a sample using a wire grid polarizer to generate interference light | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake | 2014-02-25 |
| 8629985 | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba | 2014-01-14 |
| 8284406 | Displacement measurement method and apparatus thereof, stage apparatus, and probe microscope | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba | 2012-10-09 |
| 8064066 | Method and apparatus for measuring displacement of a sample to be inspected using an interference light | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake | 2011-11-22 |
| 7834353 | Method of manufacturing display device | Mikio Hongo, Sachio Uto, Toshihiko Nakata, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2010-11-16 |
| 7612889 | Method and apparatus for measuring displacement of a sample | Toshihiko Nakata, Masahiro Watanabe, Shuichi Baba, Yasuhiro Yoshitake | 2009-11-03 |
| 7498589 | Scanning probe microscope | Shigenobu Maruyama, Toru Kurenuma, Yuichi Kunitomo, Yukio Kembo | 2009-03-03 |
| 7336816 | Method and apparatus for measuring shape of bumps | Hideaki Sasazawa, Masatoshi Yamaga, Chikara Iwata, Masashi Uehara | 2008-02-26 |
| 7326623 | Method of manufacturing display device | Mikio Hongo, Sachio Uto, Toshihiko Nakata, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2008-02-05 |
| 7272253 | Method for non-destructive inspection, apparatus thereof and digital camera system | Daisuke Katsuta, Tetsuo Taguchi, Masahiro Hotta, Isao Tanaka | 2007-09-18 |
| 7215807 | Nondestructive inspection method and apparatus | Daiske Katsuta, Toshio Asano, Kaoru Sakai, Tetsuo Taguchi, Isao Tanaka | 2007-05-08 |
| 7129124 | Display device, process of fabricating same, and apparatus for fabricating same | Mikio Hongo, Sachio Uto, Toshihiko Nakata, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2006-10-31 |
| 7119908 | Method and apparatus for measuring thickness of thin film and device manufacturing method using same | Takenori Hirose, Keiya Saito | 2006-10-10 |
| 7057744 | Method and apparatus for measuring thickness of thin film and device manufacturing method using same | Takenori Hirose, Keiya Saito | 2006-06-06 |
| 7020306 | Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device | Takenori Hirose, Hiroyuki Kojima, Susumu Aiuchi | 2006-03-28 |
| 6987874 | Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same | Takenori Hirose | 2006-01-17 |
| 6950545 | Nondestructive inspection method and apparatus | Daiske Katsuta, Toshio Asano, Kaoru Sakai, Tetsuo Taguchi, Isao Tanaka | 2005-09-27 |
| 6943086 | Laser annealing apparatus, TFT device and annealing method of the same | Mikio Hongo, Sachio Uto, Toshihiko Nakata, Mutsuko Hatano, Shinya Yamaguchi +1 more | 2005-09-13 |
| 6897079 | Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same | Takenori Hirose, Hiroyuki Kojima, Hidemi Sato | 2005-05-24 |
| 6794206 | Method of polishing a film | Takenori Hirose, Hiroyuki Kojima, Hidemi Sato | 2004-09-21 |
| 6072899 | Method and device of inspecting three-dimensional shape defect | Yoko Irie, Hideaki Doi, Hiroya Koshishiba | 2000-06-06 |
| 5973777 | Method and apparatus for inspecting defects of surface shape | Takanori Ninomiya, Yuji Takagi | 1999-10-26 |
| 5645351 | Temperature measuring method using thermal expansion and an apparatus for carrying out the same | Toshihiko Nakata, Shigeki Hirasawa, Yoko Saito, Takanori Ninomiya | 1997-07-08 |
| 5301248 | Method for pattern inspection and apparatus therefor | Ninomiya Takanori, Kazushi Yoshimura | 1994-04-05 |
| 5015097 | Method for inspecting filled state of via-holes filled with fillers and apparatus for carrying out the method | Takanori Ninomiya, Hiroya Koshishiba, Toshimitsu Hamada, Yasuo Nakagawa | 1991-05-14 |