Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4872187 | X-ray tomographic imaging system and method | Kozo Nakahata, Toshimitsu Hamada, Yasuo Nakagawa | 1989-10-03 |
| 4776023 | Pattern inspection method | Toshimitsu Hamada, Kozo Nakahata | 1988-10-04 |
| 4744047 | Pattern test apparatus including a plurality of pattern generators | Keiichi Okamoto, Toshimitsu Hamada | 1988-05-10 |
| 4628531 | Pattern checking apparatus | Keiichi Okamoto, Kozo Nakahata, Yukio Matsuyama, Hideaki Doi, Susumu Aiuchi | 1986-12-09 |
| 4420233 | Projecting apparatus | Katsuhiro Iwashita, Toru Otsubo, Susumu Aiuchi | 1983-12-13 |
| 4391511 | Light exposure device and method | Nobuyuki Akiyama, Yukio Kembo, Yasuo Nakagawa, Susumu Aiuchi | 1983-07-05 |