Issued Patents All Time
Showing 1–25 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8844061 | Scanning probe microscope | Shuichi Baba, Masahiro Watanabe, Toshihiko Nakata, Toru Kurenuma, Takafumi Morimoto +2 more | 2014-09-23 |
| 8342008 | Scanning probe microscope | Shuichi Baba, Masahiro Watanabe, Toshihiko Nakata, Toru Kurenuma, Takafumi Morimoto +2 more | 2013-01-01 |
| 8011230 | Scanning probe microscope | Masahiro Watanabe, Toru Kurenuma, Hiroshi Kuroda, Takafumi Morimoto, Shuichi Baba +2 more | 2011-09-06 |
| 7940383 | Method of detecting defects on an object | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Ryouji Matsunaga +7 more | 2011-05-10 |
| 7692779 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Ryouji Matsunaga +7 more | 2010-04-06 |
| 7639350 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Ryouji Matsunaga +7 more | 2009-12-29 |
| 7631548 | Scanning probe microscope | Shuichi Baba, Masahiro Watanabe, Toshihiko Nakata, Toru Kurenuma, Hiroshi Kuroda +2 more | 2009-12-15 |
| 7498589 | Scanning probe microscope | Shigenobu Maruyama, Mineo Nomoto, Toru Kurenuma, Yuichi Kunitomo | 2009-03-03 |
| 7443496 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Ryouji Matsunaga +7 more | 2008-10-28 |
| 7243441 | Method and apparatus for measuring depth of holes formed on a specimen | Masahiro Watanabe, Takenori Hirose, Yoshiyuki Nagano, Takafumi Morimoto | 2007-07-17 |
| 7177020 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2007-02-13 |
| 7173693 | Method for inspecting defects and an apparatus of the same | Yukihiro Shibata, Shunji Maeda | 2007-02-06 |
| 7098055 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Ryouji Matsunaga +7 more | 2006-08-29 |
| 7037735 | Apparatus and method for testing defects | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Ryouji Matsunaga +7 more | 2006-05-02 |
| 6894773 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 2005-05-17 |
| 6850320 | Method for inspecting defects and an apparatus for the same | Yukihiro Shibata, Shunji Maeda | 2005-02-01 |
| 6650409 | Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system | Minori Noguchi, Hiroshi Morioka, Hidetoshi Nishiyama, Hideaki Doi, Masataka Shiba +6 more | 2003-11-18 |
| 6411377 | Optical apparatus for defect and particle size inspection | Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Shunichi Matsumoto, Ryouji Matsunaga +7 more | 2002-06-25 |
| 5463459 | Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Hidetoshi Nishiyama, Kazuhiko Matsuoka +1 more | 1995-10-31 |
| 5274434 | Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line | Hiroshi Morioka, Minori Noguchi, Yoshimasa Ohshima, Yuzo Taniguchi | 1993-12-28 |
| 5233191 | Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process | Minori Noguchi, Hiroshi Morioka, Hiroshi Yamaguchi, Makiko Kohno, Yoshimasa Ohshima | 1993-08-03 |
| 5136172 | Method and apparatus for detecting photoacoustic signal | Toshihiko Nakata, Tsuguo Sawada, Takehiko Kitamori | 1992-08-04 |
| 5083869 | Photocoustic signal detecting device | Toshihiko Nakata | 1992-01-28 |
| 5062715 | Method and apparatus for detecting photoacoustic signal and method for detecting internal defect of semiconductor device | Toshihiko Nakata | 1991-11-05 |
| 4852133 | X-ray lithography apparatus | Minoru Ikeda, Ryuichi Funatsu, Motoya Taniguchi | 1989-07-25 |