Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4825453 | X-ray exposure apparatus | Yoshihiro Komeyama, Minoru Ikeda, Akira Inagaki | 1989-04-25 |
| 4803712 | X-ray exposure system | Minoru Ikeda, Motoya Taniguchi | 1989-02-07 |
| 4788577 | Substrate surface deflecting device | Nobuyuki Akiyama, Asahiro Kuni, Toshihiko Nakata | 1988-11-29 |
| 4777641 | Method and apparatus for alignment | Akira Inagaki, Ryuichi Funatsu, Asahiro Kuni, Keiichi Okamoto, Yoshihiro Komeyama | 1988-10-11 |
| 4708484 | Projection alignment method and apparatus | Yoshihiro Komeyama, Asahiro Kuni, Ryuuichi Funatsu, Akira Inagaki, Minoru Ikeda +1 more | 1987-11-24 |
| 4666291 | Light-exposure apparatus | Motoya Taniguchi, Asahiro Kuni, Ryuichi Funatsu, Akira Inagaki | 1987-05-19 |
| 4491787 | Flatness measuring device | Nobuyuki Akiyama, Yasuo Nakagawa | 1985-01-01 |
| 4475223 | Exposure process and system | Motoya Taniguchi, Mitsuyoshi Koizumi, Nobuyuki Akiyama, Minoru Ikeda | 1984-10-02 |
| 4447731 | Exterior view examination apparatus | Asahiro Kuni, Nobuyuki Akiyama, Nobuhiko Aoki | 1984-05-08 |
| 4391511 | Light exposure device and method | Nobuyuki Akiyama, Yasuo Nakagawa, Susumu Aiuchi, Mineo Nomoto | 1983-07-05 |
| 4213117 | Method and apparatus for detecting positions of chips on a semiconductor wafer | Asahiro Kuni, Hiroshi Makihira | 1980-07-15 |