Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4825453 | X-ray exposure apparatus | Yukio Kembo, Minoru Ikeda, Akira Inagaki | 1989-04-25 |
| 4777641 | Method and apparatus for alignment | Akira Inagaki, Yukio Kembo, Ryuichi Funatsu, Asahiro Kuni, Keiichi Okamoto | 1988-10-11 |
| 4708484 | Projection alignment method and apparatus | Yukio Kembo, Asahiro Kuni, Ryuuichi Funatsu, Akira Inagaki, Minoru Ikeda +1 more | 1987-11-24 |
| 4614431 | Alignment apparatus with optical length-varying optical system | — | 1986-09-30 |
| 4516254 | X-Ray lithographic apparatus | Motoya Taniguchi | 1985-05-07 |
| 4492356 | Precision parallel translation system | Motoya Taniguchi, Minoru Ikeda | 1985-01-08 |