Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8193493 | Charged particle beam apparatus | Sayaka Tanimoto, Hiroya Ohta, Hiroshi Makino | 2012-06-05 |
| 7906761 | Charged particle beam apparatus | Sayaka Tanimoto, Hiroya Ohta, Hiroshi Makino | 2011-03-15 |
| 7880143 | Electron beam apparatus | Sayaka Tanimoto, Hiroya Ohta, Hiroshi Makino | 2011-02-01 |
| 7855363 | Inspection method and apparatus using an electron beam | Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara | 2010-12-21 |
| 7425704 | Inspection method and apparatus using an electron beam | Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara | 2008-09-16 |
| 7271385 | Inspection method and inspection apparatus using electron beam | Yasuhiro Gunji, Taku Ninomiya, Yoshikazu Inada, Kenjirou Yamamoto, Mari Nozoe | 2007-09-18 |
| 7081625 | Charged particle beam apparatus | Masanari Furiki, Kouichi Kurosawa, Takehiko Konno | 2006-07-25 |
| 7071468 | Circuit pattern inspection method and its apparatus | Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara | 2006-07-04 |
| 7034298 | Inspection method and apparatus using an electron beam | Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara | 2006-04-25 |
| 6566654 | Inspection of circuit patterns for defects and analysis of defects using a charged particle beam | Shigeto Isakozawa, Hidemi Koike | 2003-05-20 |
| 5195070 | Optical information processing apparatus and optical pickup therefor | Masataka Shiba, Kazumi Kawamoto, Yasuo Hira, Akira Inagaki, Hidemi Sato +2 more | 1993-03-16 |
| 5134298 | Beam control method and apparatus | Akira Inagaki, Yasuhiko Nakayama | 1992-07-28 |
| 5125740 | Method and apparatus for measuring optical constants of a thin film as well as method and apparatus for fabricating a thin film utilizing same | Hidemi Sato, Yasuo Hira, Atsuko Fukushima, Hiroshi Asao, Kazumi Kawamoto +1 more | 1992-06-30 |
| 5121449 | Information detecting system of scanning type | Masataka Shiba, Motoya Taniguchi, Minoru Tanaka, Akira Inagaki | 1992-06-09 |
| 5008702 | Exposure method and apparatus | Tsutomu Tanaka, Yoshitada Oshida, Masataka Shiba, Naoto Nakashima | 1991-04-16 |
| 4852133 | X-ray lithography apparatus | Minoru Ikeda, Yukio Kembo, Motoya Taniguchi | 1989-07-25 |
| 4777641 | Method and apparatus for alignment | Akira Inagaki, Yukio Kembo, Asahiro Kuni, Keiichi Okamoto, Yoshihiro Komeyama | 1988-10-11 |
| 4666291 | Light-exposure apparatus | Motoya Taniguchi, Asahiro Kuni, Yukio Kembo, Akira Inagaki | 1987-05-19 |