| 8193493 |
Charged particle beam apparatus |
Sayaka Tanimoto, Hiroya Ohta, Hiroshi Makino |
2012-06-05 |
| 7906761 |
Charged particle beam apparatus |
Sayaka Tanimoto, Hiroya Ohta, Hiroshi Makino |
2011-03-15 |
| 7880143 |
Electron beam apparatus |
Sayaka Tanimoto, Hiroya Ohta, Hiroshi Makino |
2011-02-01 |
| 7855363 |
Inspection method and apparatus using an electron beam |
Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara |
2010-12-21 |
| 7425704 |
Inspection method and apparatus using an electron beam |
Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara |
2008-09-16 |
| 7271385 |
Inspection method and inspection apparatus using electron beam |
Yasuhiro Gunji, Taku Ninomiya, Yoshikazu Inada, Kenjirou Yamamoto, Mari Nozoe |
2007-09-18 |
| 7081625 |
Charged particle beam apparatus |
Masanari Furiki, Kouichi Kurosawa, Takehiko Konno |
2006-07-25 |
| 7071468 |
Circuit pattern inspection method and its apparatus |
Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara |
2006-07-04 |
| 7034298 |
Inspection method and apparatus using an electron beam |
Hiroshi Miyai, Taku Ninomiya, Yasuhiko Nara |
2006-04-25 |
| 6566654 |
Inspection of circuit patterns for defects and analysis of defects using a charged particle beam |
Shigeto Isakozawa, Hidemi Koike |
2003-05-20 |
| 5195070 |
Optical information processing apparatus and optical pickup therefor |
Masataka Shiba, Kazumi Kawamoto, Yasuo Hira, Akira Inagaki, Hidemi Sato +2 more |
1993-03-16 |
| 5134298 |
Beam control method and apparatus |
Akira Inagaki, Yasuhiko Nakayama |
1992-07-28 |
| 5125740 |
Method and apparatus for measuring optical constants of a thin film as well as method and apparatus for fabricating a thin film utilizing same |
Hidemi Sato, Yasuo Hira, Atsuko Fukushima, Hiroshi Asao, Kazumi Kawamoto +1 more |
1992-06-30 |
| 5121449 |
Information detecting system of scanning type |
Masataka Shiba, Motoya Taniguchi, Minoru Tanaka, Akira Inagaki |
1992-06-09 |
| 5008702 |
Exposure method and apparatus |
Tsutomu Tanaka, Yoshitada Oshida, Masataka Shiba, Naoto Nakashima |
1991-04-16 |
| 4852133 |
X-ray lithography apparatus |
Minoru Ikeda, Yukio Kembo, Motoya Taniguchi |
1989-07-25 |
| 4777641 |
Method and apparatus for alignment |
Akira Inagaki, Yukio Kembo, Asahiro Kuni, Keiichi Okamoto, Yoshihiro Komeyama |
1988-10-11 |
| 4666291 |
Light-exposure apparatus |
Motoya Taniguchi, Asahiro Kuni, Yukio Kembo, Akira Inagaki |
1987-05-19 |