Issued Patents All Time
Showing 1–25 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7460220 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected | Shunji Maeda, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2008-12-02 |
| 7235304 | Optical sensor | Hisao Tanoue, Yunosuke Makita, Zhengxin Liu | 2007-06-26 |
| 7221486 | Method and apparatus for picking up 2D image of an object to be sensed | Hiroshi Makihira, Shunji Maeda, Kenji Oka, Minoru Yoshida | 2007-05-22 |
| 7180584 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected | Shunji Maeda, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2007-02-20 |
| 7061600 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected | Shunji Maeda, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2006-06-13 |
| 6943388 | Sheet-type β-FeSi2 element, and method and device for manufacturing the same | Yunosuke Makita, Zhengxin Liu | 2005-09-13 |
| 6674890 | Defect inspection method and apparatus therefor | Shunji Maeda, Kenji Oka, Hiroshi Makihira, Minoru Yoshida, Yukihiro Shibata +1 more | 2004-01-06 |
| 6507417 | Method and apparatus for picking up 2D image of an object to be sensed | Hiroshi Makihira, Shunji Maeda, Kenji Oka, Minoru Yoshida | 2003-01-14 |
| 6404498 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns on an object to be inspected | Shunji Maeda, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2002-06-11 |
| 6263099 | Manufacturing method of semiconductor substrate and method and apparatus for inspecting defects of patterns of an object to be inspected | Shunji Maeda, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 2001-07-17 |
| 6169282 | Defect inspection method and apparatus therefor | Shunji Maeda, Kenji Oka, Hiroshi Makihira, Minoru Yoshida, Yukihiro Shibata +1 more | 2001-01-02 |
| 6091075 | Automatic focus detection method, automatic focus detection apparatus, and inspection apparatus | Yukihiro Shibata, Shunji Maeda, Hiroshi Makihara, Minoru Yoshida, Kenji Oka | 2000-07-18 |
| 5774222 | Manufacturing method of semiconductor substrative and method and apparatus for inspecting defects of patterns on an object to be inspected | Shunji Maeda, Minoru Yoshida, Hitoshi Kubota, Kenji Oka | 1998-06-30 |
| 5747201 | Controlling method of forming thin film, system for said controlling method, exposure method and system for said exposure method | Masataka Shiba, Susumu Komoriya | 1998-05-05 |
| 5677755 | Method and apparatus for pattern exposure, mask used therefor, and semiconductor integrated circuit produced by using them | Yoshitada Oshida, Masahiro Watanabe, Minoru Yoshida, Kenichirou Fukuda | 1997-10-14 |
| 5409538 | Controlling method of forming thin film, system for said controlling method, exposure method and system for said exposure method | Masataka Shiba, Susumu Komoriya | 1995-04-25 |
| 5324953 | Reduced-projection exposure system with chromatic aberration correction system including diffractive lens such as holographic lens | Yasuhiro Yoshitake, Yoshitada Oshida, Masataka Shiba | 1994-06-28 |
| 5134298 | Beam control method and apparatus | Akira Inagaki, Ryuichi Funatsu | 1992-07-28 |
| D327905 | Combined image copier and printer | Hiroshi Kamijima, Tomio Kouzu, Wataru Ogura | 1992-07-14 |
| D306036 | 35 mm camera | — | 1990-02-13 |
| D306037 | 35 mm camera | — | 1990-02-13 |
| D302683 | Image information reading machine for electronic computer | Hiroyoshi Iwasaki | 1989-08-08 |
| 4796134 | Magnetic head with improved supporter for perpendicular magnetization recording | Yoshio Watanabe, Nobuaki Furuya, Hiroshi Miyama | 1989-01-03 |
| 4745509 | Magnetic head with improved supporter for perpendicular magnetization recording | Yoshio Watanabe, Nobuaki Furuya, Hiroshi Miyama | 1988-05-17 |
| 4672494 | Magnetic head for effecting perpendicular magnetic recording | Nobuaki Furuya, Yoshio Watanabe | 1987-06-09 |