Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7221486 | Method and apparatus for picking up 2D image of an object to be sensed | Shunji Maeda, Kenji Oka, Minoru Yoshida, Yasuhiko Nakayama | 2007-05-22 |
| 6674890 | Defect inspection method and apparatus therefor | Shunji Maeda, Kenji Oka, Yasuhiko Nakayama, Minoru Yoshida, Yukihiro Shibata +1 more | 2004-01-06 |
| 6507417 | Method and apparatus for picking up 2D image of an object to be sensed | Shunji Maeda, Kenji Oka, Minoru Yoshida, Yasuhiko Nakayama | 2003-01-14 |
| 6317512 | Pattern checking method and checking apparatus | Shunji Maeda, Hitoshi Kubota, Takashi Hiroi | 2001-11-13 |
| 6169282 | Defect inspection method and apparatus therefor | Shunji Maeda, Kenji Oka, Yasuhiko Nakayama, Minoru Yoshida, Yukihiro Shibata +1 more | 2001-01-02 |
| 5649022 | Pattern checking method and checking apparatus | Shunji Maeda, Hitoshi Kubota, Takashi Hiroi | 1997-07-15 |
| 5430548 | Method and apparatus for pattern detection | Takashi Hiroi, Hitoshi Kubota, Shunji Maeda, Mitsunobu Isobe | 1995-07-04 |
| 5153444 | Method and apparatus for detecting patterns | Shunji Maeda, Takashi Hiroi, Hitoshi Kubota, Fumiaki Endo | 1992-10-06 |
| 4791586 | Method of and apparatus for checking geometry of multi-layer patterns for IC structures | Shunji Maeda, Hitoshi Kubota, Satoru Fushimi, Takanori Ninomiya, Yasuo Nakagawa | 1988-12-13 |
| 4725722 | Automatic focusing method and apparatus utilizing contrasts of projected pattern | Shunji Maeda, Hitoshi Kubota | 1988-02-16 |
| 4614430 | Method of detecting pattern defect and its apparatus | Yasuhiko Hara, Yoshimasa Ohshima, Satoru Fushimi | 1986-09-30 |
| 4556797 | Method and apparatus for detecting edge of fine pattern on specimen | Asahiro Kuni, Toshimitsu Hamada, Kazushi Yoshimura | 1985-12-03 |
| 4472056 | Shape detecting apparatus | Yasuo Nakagawa, Souhei Ikeda, Satoru Ezaki, Osamu Harada | 1984-09-18 |
| 4410278 | Method and apparatus for appearance inspection | Yasuo Nakagawa, Toshimitsu Hamada, Makoto Udaka | 1983-10-18 |
| 4403294 | Surface defect inspection system | Toshimitsu Hamada, Yasuo Nakagawa, Makoto Udaka | 1983-09-06 |
| 4343553 | Shape testing apparatus | Yasuo Nakagawa, Yoshitada Oshida, Nobuyuki Akiyama | 1982-08-10 |
| 4226539 | Cylindrical body appearance inspection apparatus | Yasuo Nakagawa, Toshimitsu Hamada | 1980-10-07 |
| 4213117 | Method and apparatus for detecting positions of chips on a semiconductor wafer | Yukio Kembo, Asahiro Kuni | 1980-07-15 |